SYSTEM AND METHOD FOR MODULATION MAPPING
First Claim
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1. A method for probing an integrated circuit (IC), comprising:
- stimulating said IC with a test signal;
illuminating a selected area of said IC with a laser beam;
collecting beam reflection from said IC;
converting said beam reflection to an electrical probing signal;
selecting a frequency or a band of frequencies of said probing signal;
calculating at least one of a total amplitude, a total intensity, and a phase of said probing signal at the selected frequency or band of frequencies;
generating a spatial map of one of said total amplitude, total intensity, and phase, for various locations over a selected area of said IC; and
displaying the spatial map on a monitor.
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Abstract
An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
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Citations
20 Claims
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1. A method for probing an integrated circuit (IC), comprising:
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stimulating said IC with a test signal; illuminating a selected area of said IC with a laser beam; collecting beam reflection from said IC; converting said beam reflection to an electrical probing signal; selecting a frequency or a band of frequencies of said probing signal; calculating at least one of a total amplitude, a total intensity, and a phase of said probing signal at the selected frequency or band of frequencies; generating a spatial map of one of said total amplitude, total intensity, and phase, for various locations over a selected area of said IC; and displaying the spatial map on a monitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for probing an integrated circuit (IC), comprising:
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stimulating said IC with a test signal; illuminating a selected area of said IC with a laser beam; collecting beam reflection from said IC; converting said beam reflection to an electrical probing signal; selecting a frequency or a band of frequencies of said probing signal; calculating at least one of a total amplitude, a total intensity, and a phase of said probing signal at the selected frequency or band of frequencies and comparing the results to a reference signal of a good IC.
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14. A method for probing an integrated circuit (IC), comprising:
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illuminating the IC with a light beam; stimulating said IC with a test signal; collecting beam reflection from said IC, wherein the beam reflection is modulated by the IC response to the test signal; converting said beam reflection to an electrical probing signal; detecting modulated beam reflection of said probing signal over a selected time period to obtain total modulation; displaying said total modulation for a fixed position or various locations over a selected area of said IC. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification