FOUP OPENING/CLOSING DEVICE AND PROBE APPARATUS
First Claim
1. A Front Opening Unified Pod (FOUP) opening/closing device to open or close a door of an FOUP, comprising:
- a housing in which a mounting table for mounting the FOUP thereon is disposed;
an FOUP loading opening formed on a front surface of the housing and configured to be opened or closed by a shutter;
a delivery opening formed on a side surface of the housing to be used to deliver a substrate in the FOUP;
a rotator for rotating the mounting table about a vertical axis;
a door opening/closing unit disposed in the housing at a position of a rear surface of the housing to be used to open or close the door of the FOUP and keep the door open;
a mover for moving the FOUP and the door opening/closing unit in a reciprocating manner relative to each other, so as to allow the FOUP and the door opening/closing unit to be connected to or separated from each other; and
a controller to output control signals for moving the FOUP and the door opening/closing unit relative to each other via operation of the mover so as to mount the door of the FOUP to the door opening/closing unit, separating the door from the FOUP, moving the FOUP and the door opening/closing unit away from each other, and rotating the mounting table to make the FOUP face the delivery opening.
1 Assignment
0 Petitions
Accused Products
Abstract
A FOUP opening/closing device includes a housing containing a mounting table for mounting the FOUP thereon, an FOUP loading opening, and a delivery opening. The device further includes a rotator for rotating the mounting table, a door opening/closing unit to open or close the door of the FOUP and keep the door open, a mover for moving the FOUP and the door opening/closing unit in a reciprocating manner, to allow the FOUP and the door opening/closing unit to be connected to or separated from each other, and a controller to output control signals for moving the FOUP and the door opening/closing unit via operation of the mover to mount the door of the FOUP to the door opening/closing unit, separating the door from the FOUP, moving the FOUP and the door opening/closing unit away from each other, and rotating the mounting table to make the FOUP face the delivery opening.
349 Citations
6 Claims
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1. A Front Opening Unified Pod (FOUP) opening/closing device to open or close a door of an FOUP, comprising:
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a housing in which a mounting table for mounting the FOUP thereon is disposed; an FOUP loading opening formed on a front surface of the housing and configured to be opened or closed by a shutter; a delivery opening formed on a side surface of the housing to be used to deliver a substrate in the FOUP; a rotator for rotating the mounting table about a vertical axis; a door opening/closing unit disposed in the housing at a position of a rear surface of the housing to be used to open or close the door of the FOUP and keep the door open; a mover for moving the FOUP and the door opening/closing unit in a reciprocating manner relative to each other, so as to allow the FOUP and the door opening/closing unit to be connected to or separated from each other; and a controller to output control signals for moving the FOUP and the door opening/closing unit relative to each other via operation of the mover so as to mount the door of the FOUP to the door opening/closing unit, separating the door from the FOUP, moving the FOUP and the door opening/closing unit away from each other, and rotating the mounting table to make the FOUP face the delivery opening. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification