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FOUP OPENING/CLOSING DEVICE AND PROBE APPARATUS

  • US 20100040441A1
  • Filed: 08/12/2009
  • Published: 02/18/2010
  • Est. Priority Date: 08/13/2008
  • Status: Active Grant
First Claim
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1. A Front Opening Unified Pod (FOUP) opening/closing device to open or close a door of an FOUP, comprising:

  • a housing in which a mounting table for mounting the FOUP thereon is disposed;

    an FOUP loading opening formed on a front surface of the housing and configured to be opened or closed by a shutter;

    a delivery opening formed on a side surface of the housing to be used to deliver a substrate in the FOUP;

    a rotator for rotating the mounting table about a vertical axis;

    a door opening/closing unit disposed in the housing at a position of a rear surface of the housing to be used to open or close the door of the FOUP and keep the door open;

    a mover for moving the FOUP and the door opening/closing unit in a reciprocating manner relative to each other, so as to allow the FOUP and the door opening/closing unit to be connected to or separated from each other; and

    a controller to output control signals for moving the FOUP and the door opening/closing unit relative to each other via operation of the mover so as to mount the door of the FOUP to the door opening/closing unit, separating the door from the FOUP, moving the FOUP and the door opening/closing unit away from each other, and rotating the mounting table to make the FOUP face the delivery opening.

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