TRIAXIAL ACCELERATION SENSOR
First Claim
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1. An acceleration sensor, comprising:
- a substrate;
a rocker mass;
a z spring connected to the rocker mass and arranged to allow the rocker mass to rotate about an axis; and
at least one additional spring system connected to the substrate and the rocker mass;
wherein the additional spring system is configured to allow the rocker mass to deflect in at least one of (a) an x and (b) a y direction oriented one of (a) parallel and (b) perpendicular to the axis, at least one of (a) the z spring and (b) the additional spring system configured to allow the rocker mass to deflect in at least one of (a) a y and (b) an x direction oriented one of (a) parallel and (b) perpendicular to the axis.
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Abstract
An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
15 Citations
11 Claims
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1. An acceleration sensor, comprising:
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a substrate; a rocker mass; a z spring connected to the rocker mass and arranged to allow the rocker mass to rotate about an axis; and at least one additional spring system connected to the substrate and the rocker mass; wherein the additional spring system is configured to allow the rocker mass to deflect in at least one of (a) an x and (b) a y direction oriented one of (a) parallel and (b) perpendicular to the axis, at least one of (a) the z spring and (b) the additional spring system configured to allow the rocker mass to deflect in at least one of (a) a y and (b) an x direction oriented one of (a) parallel and (b) perpendicular to the axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification