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Method and Apparatus for a Micromachined Multisensor

  • US 20100043551A1
  • Filed: 08/19/2008
  • Published: 02/25/2010
  • Est. Priority Date: 08/19/2008
  • Status: Active Grant
First Claim
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1. A method of detecting displacement of a MEMS structure, the method including:

  • providing at least one drive capacitor for electrostatically driving the MEMS structure, wherein the capacitance of the at least one drive capacitor varies as a function of the displacement of the MEMS structure;

    charging the at least one drive capacitor;

    measuring the electrical charge on the at least one drive capacitor; and

    determining the displacement of the MEMS structure as a function of the electrical charge measured on the at least one drive capacitor.

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