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ELECTROSTATICE CHUCK WITH ANTI-REFLECTIVE COATING, MEASURING METHOD AND USE OF SAID CHUCK

  • US 20100046005A1
  • Filed: 10/16/2007
  • Published: 02/25/2010
  • Est. Priority Date: 10/16/2006
  • Status: Active Grant
First Claim
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1. A device for the contactless detection of a three-dimensional contour comprising:

  • a projector with an image-producing element and a projection lens for imaging a stripe pattern which can be generated on the image-producing element in an object space; and

    a camera arrangement which includes two camera lenses for observing the object space from two different directions, wherein the projector and the camera arrangement are configured together in one measuring head which can be used as a hand-held device.

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