GLASS CERAMIC COMPOSITION, GLASS CERAMIC SINTERED BODY, AND MULTILAYER CERAMIC ELECTRONIC DEVICE

• US 20100046137A1
• Filed: 11/04/2009
• Published: 02/25/2010
• Est. Priority Date: 03/13/2008
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: ADACHI, Hiroshige
• Granted Patent: US 8,199,455 B2
• Time in Patent Office: Days
• US Class Current: 361/301.400
• CPC Class Codes: C03C 12/00 Powdered glass C03C8/02 takes precedence; Bead compositions
• CPC Class Codes: C03C 3/066 containing zinc
• CPC Class Codes: C04B 2235/3208 Calcium oxide or oxide-forming salts thereof, e.g. lime
• CPC Class Codes: C04B 2235/3213 Strontium oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3215 Barium oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3217 Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
• CPC Class Codes: C04B 2235/3224 Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
• CPC Class Codes: C04B 2235/3227 Lanthanum oxide or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3232 Titanium oxides or titanates, e.g. rutile or anatase
• CPC Class Codes: C04B 2235/3236 Alkaline earth titanates
• CPC Class Codes: C04B 2235/3248 Zirconates or hafnates, e.g. zircon
• CPC Class Codes: C04B 2235/3445 Magnesium silicates, e.g. forsterite
• CPC Class Codes: C04B 2235/365 Borosilicate glass
• CPC Class Codes: C04B 2235/5409 expressed by specific surface values
• CPC Class Codes: C04B 2235/5436 micrometer sized, i.e. from 1 to 100 micron
• CPC Class Codes: C04B 2235/5445 submicron sized, i.e. from 0,1 to 1 micron
• CPC Class Codes: C04B 2235/6025 Tape casting, e.g. with a doctor blade
• CPC Class Codes: C04B 2235/96 Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
• CPC Class Codes: C04B 35/20 rich in magnesium oxide , e.g. forsterite C04B35/195 takes precedence
• CPC Class Codes: C04B 35/462 based on titanates
• CPC Class Codes: C04B 35/486 : Fine ceramics
• CPC Class Codes: H01L 2224/16227 : the bump connector connecting to a bond pad of the item
• CPC Class Codes: H01L 2924/15192 : Resurf arrangement of the internal vias
• CPC Class Codes: H01L 2924/15313 : being a land array, e.g. LGA
• CPC Class Codes: H01L 2924/16251 : Connecting to an item not being a semiconductor or solid-state body, e.g. cap-to-substrate
• CPC Class Codes: H01L 2924/19105 : in a side-by-side arrangement on a common die mounting substrate
• CPC Class Codes: H05K 1/0306 : Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 3/4611 : by laminating two or more circuit boards H05K3/4652 takes precedence
• CPC Class Codes: H05K 3/4629 : laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets

Abstract

A glass ceramic composition is provided which can be fired at a temperature of 1,000° C. or less to form a sintered body having a low relative dielectric constant, a small temperature coefficient of resonant frequency, a small change in capacitance before and after a loading test, a high Qf value, high electrical insulating reliability, and a high flexural strength. A glass ceramic composition forming glass ceramic layers laminated to each other in a multilayer ceramic substrate is also provided. The glass ceramic composition includes a first ceramic powder containing forsterite as a primary component; a second ceramic powder containing SrTiO₃ and/or TiO₂ as a primary component; a third ceramic powder containing BaZrO₃ as a primary component; a fourth ceramic powder containing SrZrO₃ as a primary component; and a borosilicate glass which contains Li₂O, MgO, B₂O₃, SiO₂, and ZnO, and also which contains at least one of CaO, BaO, and SrO.

Claims

1. A glass ceramic composition comprising:

a first ceramic powder containing forsterite as a primary component;

a second ceramic powder containing at least one of strontium titanate and titanium oxide as a primary component;

2 to 20 percent by weight of a third ceramic powder containing BaZrO₃ as a primary component;

more than 2 up to 20 percent by weight of a fourth ceramic powder containing SrZrO₃ as a primary component; and

3 to 20 percent by weight of a borosilicate glass containing 3 to 15 percent by weight of lithium calculated in the form of Li₂O, 20 to 50 percent by weight of magnesium calculated in the form of MgO, 15 to 30 percent by weight of boron calculated in the form of B₂O₃, 10 to 35 percent by weight of silicon calculated in the form of SiO₂, 6 to 20 percent by weight of zinc calculated in the form of ZnO, and at least 5 percent by weight at least one additive component selected from the group consisting of calcium oxide, barium oxide, and strontium oxide calculated in the form of CaO, BaO, and SrO, respectively,

wherein the content of the additive component contained in the borosilicate glass powder is up to 15 percent by weight when in the form of CaO, and up to 25 percent by weight when in the form of BaO or SrO, and

when the second ceramic powder includes the ceramic powder containing strontium titanate as a primary component, the content of strontium titanate is in the range of 3 to 13 percent by weight in the form of SrTiO₃, and when the second ceramic powder includes the ceramic powder containing titanium oxide as a primary component, the content of titanium oxide is in the range of 0.3 to 10 percent by weight in the form of TiO₂.

2. A glass ceramic composition according to claim 1, wherein the forsterite has a MgO/SiO₂ molar ratio of 1.92 to 2.04.

3. A glass ceramic composition according to claim 2, wherein the strontium titanate has a SrO/TiO₂ molar ratio of 0.92 to 1.05.

4. A glass ceramic composition according to claim 3, wherein the medium D₅₀ value of the first ceramic powder is 1 μ

m or less, and the specific surface area of the strontium titanate is 1.5 to 7.5 m²/g.

5. A glass ceramic comprising the sintered glass ceramic of claim 4.

6. A glass ceramic comprising the sintered glass ceramic of claim 3.

7. A glass ceramic comprising the sintered glass ceramic of claim 2.

8. A glass ceramic comprising the sintered glass ceramic of claim 1.

9. A glass ceramic sintered body obtained by a process comprising the steps of:

forming the glass ceramic composition according to claim 1 into a predetermined shape; and

firing the shaped composition at a temperature of 1,000°

C. or less.

10. A multilayer ceramic electronic device comprising:

a plurality of stacked layers of the glass ceramic according to claim 8; and

wiring conductors comprising at least one of copper and silver in association with at least one of the glass ceramic layers.

11. A multilayer ceramic electronic device according to claim 10 in which a pair of the glass ceramic layers sandwich at least one layer of a ceramic having a higher relative dielectric constant than the higher of the pair of glass ceramic layers.

12. A multilayer ceramic electronic device according to claim 11 in which the pair of the glass ceramic layers have a relative dielectric constant of 10 or less, and the layer of a ceramic having a higher relative dielectric constant has a relative dielectric constant of 15 or more.

13. A multilayer ceramic electronic device according to claim 12 in which the layer of a ceramic having a higher relative dielectric constant has a relative dielectric constant of 30 or more.

14. A multilayer ceramic electronic device comprising:

a plurality of stacked layers of the glass ceramic according to claim 7; and

wiring conductors comprising at least one of copper and silver in association with at least one of the glass ceramic layers.

15. A multilayer ceramic electronic device according to claim 14 in which a pair of the glass ceramic layers sandwich at least one layer of a ceramic having a higher relative dielectric constant than the higher of the pair of glass ceramic layers.

16. A multilayer ceramic electronic device comprising:

a plurality of stacked layers of the glass ceramic according to claim 6; and

wiring conductors comprising at least one of copper and silver in association with at least one of the glass ceramic layers.

17. A multilayer ceramic electronic device comprising:

a plurality of stacked layers of the glass ceramic according to claim 5; and

wiring conductors comprising at least one of copper and silver in association with at least one of the glass ceramic layers.

18. A multilayer ceramic electronic device according to claim 17 in which a pair of the glass ceramic layers sandwich at least one layer of a ceramic having a higher relative dielectric constant than the higher of the pair of glass ceramic layers.

19. A multilayer ceramic electronic device according to claim 18 in which the pair of the glass ceramic layers have a relative dielectric constant of 10 or less, and the layer of a ceramic having a higher relative dielectric constant has a relative dielectric constant of 15 or more.

20. A multilayer ceramic electronic device according to claim 19 in which the layer of a ceramic having a higher relative dielectric constant has a relative dielectric constant of 30 or more.