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DIRECTIONAL SILICON CONDENSOR MICROPHONE HAVING ADDITIONAL BACK CHAMBER

  • US 20100046780A1
  • Filed: 09/25/2009
  • Published: 02/25/2010
  • Est. Priority Date: 05/09/2006
  • Status: Active Grant
First Claim
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1. A silicon condenser microphone comprising:

  • a case;

    a substrate connected to the case;

    the substrate and the case defining an interior space,a MEMS chip located in the interior space,the MEMS chip having a first back chamber,a chamber case located in the interior space,a chamber case having a second back chamber,the chamber case located on top of the substrate,the MEMS chip being located next to the chamber case such that the first back chamber and the second back chamber are connected.

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