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SUBSTRATE, SUBSTRATE INSPECTING METHOD AND METHODS OF MANUFACTURING AN ELEMENT AND A SUBSTRATE

  • US 20100047933A1
  • Filed: 10/29/2009
  • Published: 02/25/2010
  • Est. Priority Date: 06/01/2006
  • Status: Abandoned Application
First Claim
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1. A substrate inspection method comprising the steps of:

  • preparing a substrate provided at its main surface with a plurality of layers;

    forming an opening at the main surface of said substrate by removing at least partially said plurality of layers in a region provided with said plurality of layers; and

    performing an inspection on said layer exposed in said opening.

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