METHOD OF MANUFACTURING THIN FILM TRANSISTOR ARRAY SUBSTRATE
First Claim
1. A method of manufacturing a thin film transistor array substrate, comprising:
- forming gate electrodes, gate lines and gate pads on a substrate with the use of a first mask;
forming a gate insulation film, a semiconductor layer, and a metal layer on the substrate;
forming a first photoresist pattern on the metal layer with the use of a second mask;
forming first contact holes for the gate pads with the use of the first photoresist pattern;
ashing the first photoresist pattern to form a second photoresist pattern, and forming patterns for data pads, data lines, and thin film transistors with the use of the second photoresist pattern;
ashing the second photoresist pattern to form a third photoresist pattern, and forming contact holes for source/drain electrodes and second contact holes for the gate pads with the use of the third photoresist pattern;
forming a protective film on the substrate and providing a fourth photoresist pattern on the protective film with the use of a third mask;
forming third contact holes for the gate pads, contact holes for the data pads, gate lines, and drain electrodes, and contact holes for pixel electrodes, with the use of the fourth photoresist pattern;
forming a transparent conduction film on the fourth photoresist pattern having the contact holes, to provide first transparent electrodes for the gate pads into the third contact holes, second transparent electrodes into the contact holes for the data pads, third transparent electrodes into the contact holes for the pixel electrodes, fourth transparent electrodes into the contact holes for the gate lines, and fifth transparent electrodes into the contact holes for the drain electrodes; and
removing the fourth photoresist pattern,wherein the third mask includes transmissive regions transmitting lights, semi-transmissive transmissive regions partially transmitting and intercepting the lights, and interceptive regions intercepting the lights, and the three regions have different transmittances.
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Accused Products
Abstract
A simplified method of manufacturing a thin film transistor array substrate is disclosed. The method includes: forming gate electrodes, gate lines and gate pads on a substrate with the use of a first mask; forming a gate insulation film, a semiconductor layer, and a metal layer on the substrate; forming a first photoresist pattern on the metal layer with the use of a second mask; forming first contact holes for the gate pads with the use of the first photoresist pattern; forming a second photoresist pattern, and providing patterns for data pads, data lines, and thin film transistors with the use of the second photoresist pattern; providing a third photoresist pattern, and forming contact holes for source/drain electrodes and second contact holes the gate pads with the use of the third photoresist pattern; forming a protective film on the substrate and providing a fourth photoresist pattern on the protective film with the use of a third mask; forming third contact holes for the gate pads, contact holes for the data pads, gate lines, and drain electrodes, and contact holes for pixel electrodes, with the use of the fourth photoresist pattern; and forming a transparent conduction film on the fourth photoresist pattern having the contact holes.
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Citations
10 Claims
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1. A method of manufacturing a thin film transistor array substrate, comprising:
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forming gate electrodes, gate lines and gate pads on a substrate with the use of a first mask; forming a gate insulation film, a semiconductor layer, and a metal layer on the substrate; forming a first photoresist pattern on the metal layer with the use of a second mask; forming first contact holes for the gate pads with the use of the first photoresist pattern; ashing the first photoresist pattern to form a second photoresist pattern, and forming patterns for data pads, data lines, and thin film transistors with the use of the second photoresist pattern; ashing the second photoresist pattern to form a third photoresist pattern, and forming contact holes for source/drain electrodes and second contact holes for the gate pads with the use of the third photoresist pattern; forming a protective film on the substrate and providing a fourth photoresist pattern on the protective film with the use of a third mask; forming third contact holes for the gate pads, contact holes for the data pads, gate lines, and drain electrodes, and contact holes for pixel electrodes, with the use of the fourth photoresist pattern; forming a transparent conduction film on the fourth photoresist pattern having the contact holes, to provide first transparent electrodes for the gate pads into the third contact holes, second transparent electrodes into the contact holes for the data pads, third transparent electrodes into the contact holes for the pixel electrodes, fourth transparent electrodes into the contact holes for the gate lines, and fifth transparent electrodes into the contact holes for the drain electrodes; and removing the fourth photoresist pattern, wherein the third mask includes transmissive regions transmitting lights, semi-transmissive transmissive regions partially transmitting and intercepting the lights, and interceptive regions intercepting the lights, and the three regions have different transmittances. - View Dependent Claims (2, 3, 4, 5)
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6. A method of manufacturing a thin film transistor array substrate, comprising:
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forming gate electrodes, gate lines and gate pads on a substrate with the use of a first mask; forming a gate insulation film, a semiconductor layer, and a metal layer on the substrate; forming a first photoresist pattern on the metal layer with the use of a second mask; forming first contact holes for the gate pads, patterns for the gate pads and gate lines, and patterns for data lines and thin film transistors, with the use of the first photoresist pattern; ashing the first photoresist pattern to form a second photoresist pattern, and forming source/drain electrodes and second contact holes for the gate pads and removing the metal layer of the patterns for the gate pads and lines, with the use of the second photoresist pattern; forming a protective film on the substrate and providing a third photoresist pattern on the protective film with the use of a third mask; forming third contact holes for the gate pads, contact holes for pixel electrodes, and contact holes for the gate lines and drain electrodes, with the use of the third photoresist pattern; forming a transparent conduction film on the third photoresist pattern having the contact holes, to provide first transparent electrodes into the third contact holes for the gate pads, second transparent electrodes into the contact holes for the pixel electrodes, third transparent electrodes into the contact holes for the gate lines, and fourth transparent electrodes into the contact holes for the drain electrodes; and removing the third photoresist pattern, wherein the third mask includes transmissive regions transmitting lights, semi-transmissive regions partially transmitting and intercepting the lights, and interceptive regions intercepting the lights, and the three regions have different transmittances. - View Dependent Claims (7, 8, 9, 10)
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Specification