Angular velocity sensor
First Claim
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1. An angular velocity sensor comprising:
- a first sensor unit including a first drive member configured to be driven in a first direction, a first detection member configured to move in a second direction perpendicular to the first direction, and a first elastic member configured to join the first drive member to the first detection member;
a second sensor unit including a second drive member configured to driven in the first direction, a second detection member configured to move in the second direction, and a second elastic member configured to join the second drive member to the second detection member; and
a first coupling beam joined to front surfaces of the first and second drive members to couple the first and second drive members together, whereinthe first coupling beam is spaced from front surfaces of the first and second detection members.
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Abstract
An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.
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Citations
40 Claims
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1. An angular velocity sensor comprising:
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a first sensor unit including a first drive member configured to be driven in a first direction, a first detection member configured to move in a second direction perpendicular to the first direction, and a first elastic member configured to join the first drive member to the first detection member; a second sensor unit including a second drive member configured to driven in the first direction, a second detection member configured to move in the second direction, and a second elastic member configured to join the second drive member to the second detection member; and a first coupling beam joined to front surfaces of the first and second drive members to couple the first and second drive members together, wherein the first coupling beam is spaced from front surfaces of the first and second detection members. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An angular velocity sensor comprising:
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a first sensor unit including a first drive member configured to be driven in a first direction, a first detection member configured to move in a second direction perpendicular to the first direction, and a first elastic member configured to join the first drive member to the first detection member; a second sensor unit including a second drive-member configured to driven in the first direction, a second detection member configured to move in the second direction, and a second elastic member configured to join the second drive member to the second detection member; and a first coupling beam joined to front surfaces of the first and second detection members to couple the first and second detection members together, wherein the first coupling beam is spaced from front surfaces of the first and second drive members. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An angular velocity sensor, comprising:
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a first oscillator configured to vibrate in a predetermined direction; a second oscillator configured to vibrate in the predetermined direction; and a coupling beam configured to couple the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in the predetermined direction, wherein the coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion having elasticity in the predetermined direction, the first post portion extends away from the surface of the first oscillator in a thickness direction of the first oscillator, the second post portion extends away from the surface of the second oscillator in a thickness direction of the second oscillator, and the spring portion joins the first post portion to the second post portion and is spaced from the first and second oscillators. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. An angular velocity sensor comprising
a first oscillator configured to vibrate in a predetermined direction; - .
a second oscillator configured to vibrate in the predetermined direction; and a pair of first and second coupling beams configured to couple the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in the predetermined direction, wherein the first coupling beam includes a first post portion joined to a front surface of the first oscillator, a second post portion joined to a front surface of the second oscillator, and a first spring portion having elasticity in the predetermined direction, the first post portion extends away from the front surface of the first oscillator in a thickness direction of the first oscillator, the second post portion extends away from the front surface of the second oscillator in a thickness direction of the second oscillator, and the first spring portion joins the first post portion to the second post portion and is spaced from the front surfaces of the first and second oscillators, the second coupling beam includes a third post portion joined to a back surface of the first oscillator, a fourth post portion joined to a back surface of the second oscillator, and a second spring portion having elasticity in the predetermined direction, the third post portion extends away from the back surface of the first oscillator in the thickness direction of the first oscillator, the fourth post portion extends away from the back surface of the second oscillator in the thickness direction of the second oscillator, and the second spring portion joins the third post portion to the fourth post portion and is spaced from the back surfaces of first and second oscillators. - View Dependent Claims (35, 36, 37, 38, 39)
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40. An angular velocity sensor comprising:
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at least two sensor units, each sensor unit comprising; a drive weight movable in a first direction; a detection weight movable in a second direction perpendicular to the first direction; and a middle weight located between the drive weight and the detection weight, the middle weight configured to move in the first direction when the drive weight moves in the first direction, the middle weight configured to cause the detection weight to move in the second direction when the middle weight moves in the second direction; and a coupling beam configured to couple the middle weights of the at least two sensor units together by crossing over the drive weights of the at least two sensor units or the detection weights of the at least two sensor units.
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Specification