CARRIER HAVING INTEGRAL DETECTION AND MEASUREMENT OF ENVIRONMENTAL PARAMETERS

• US 20100051502A1
• Filed: 09/04/2008
• Published: 03/04/2010
• Est. Priority Date: 09/04/2008
• Status: Abandoned Application

• Current Assignee: Desco Industries Incorporated
• Original Assignee: 3M Innovative Properties Company (3M Company)
• Inventors: Kirschhoffer, Jon A., Carlson, James G., Knudson, Orlin B., CYBULSKI, ERIC, Engelhardt, Ashley E., Kraz, Vladimir
• Application Number:
  US12/204,570
• Publication Number:
  US 20100051502A1
• Time in Patent Office: Days
• US Class Current: 206/710
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67389 characterised by atmosphere control
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
• CPC Class Codes: Y10T 29/49718 Repairing

Abstract

A carrier includes an enclosure for storing articles sensitive to electrostatic discharge (ESD) and a replacement component that is affixed to the enclosure as an integral component of the carrier. The replacement component includes a housing that provides an enclosure for a device having a sensor for sensing one or more environmental parameters. At least one of the sensed environmental parameters is an ESD parameter.

Claims

1. A carrier comprising:

an enclosure for storing articles sensitive to electrostatic discharge (ESD); and

a replacement component that is affixed to the enclosure as an integral component of the carrier,

wherein the replacement component comprises a housing that provides an enclosure for a device having a sensor for sensing one or more environmental parameters, wherein at least one of the environmental parameters comprises an ESD parameter.

2. The carrier of claim 1, wherein the replacement component is affixed to the enclosure at a position and orientation to replace an original component of the carrier that has been removed from the carrier.

3. The carrier of claim 1, wherein the carrier is sized to conform to an industry-standard form factor for carriers of article sensitive to ESD, and

wherein the replacement component is affixed to the enclosure at a position and orientation to replace an original component of the carrier without substantially changing the form factor of the carrier.

4. The carrier of claim 1, wherein an outer surface of the enclosure of the carrier defines a recess, and wherein the replacement component is positioned within the recess.

5. The carrier of claim 4, wherein the replacement component is affixed to the enclosure at a position and orientation within the recess where an original component of the carrier was positioned prior to removal of the original component from the carrier.

6. The carrier of claim 1, wherein the replacement component comprises a replacement handle for the carrier, and wherein the replacement handle provides an entire enclosure for the device.

7. The carrier of claim 1, wherein the replacement component comprises a replacement member sized to replace an original bottom surface of the enclosure.

8. The carrier of claim 1, wherein the carrier is a carrier for use in a semiconductor manufacturing process, and wherein the articles comprise one of wafers, masks, and photolithography reticles for use in the semiconductor manufacturing process.

9. The carrier or claim 1, wherein the ESD parameter comprises one of a magnitude of a detected ESD event and an amount of static voltage.

10. The carrier of claim 1, wherein the one or more environmental parameters comprises one or more of a temperature, a humidity level, an acceleration, an inclination, and presence of a chemical.

11. The carrier of claim 1, wherein the device within the replacement component comprises:

a data logging device within the replacement component that collects data from the sensor; and

a memory within the replacement component, wherein the data logging device records the collected data into the memory.

12. The carrier of claim 11, wherein the device within the replacement component further comprises a radio frequency (RF) element, wherein the RF element transmits the collected data to an external device via an RF transmission.

13. The carrier of claim 1, further comprising a battery within the replacement component that provides power to the sensor,

wherein the battery is a rechargeable battery, and

wherein the housing of the replacement element includes a recharging element positioned on an exterior surface of the housing such that the battery may be recharged by placing the replacement component on a charger without opening the housing.

14. The carrier of claim 1, wherein the replacement component is removable from the carrier.

15. The carrier of claim 1, wherein the device within the replacement component further comprises a printed circuit board,

wherein the printed circuit board is mounted entirely within the housing, wherein the printed circuit board is positioned on mounts protruding from an interior of a bottom portion of the replacement component such that the printed circuit board avoids contact with the interior of the bottom portion of the replacement component when the printed circuit board is mounted within the housing, and

wherein the sensor is provided on the printed circuit board.

16. The carrier of claim 1, wherein the housing of replacement component comprises:

a bottom portion that forms a recess in which the sensor is positioned, and

a top portion that fits over the recess as a lid such that the sensor is enclosed by the bottom portion and the top portion, wherein the top portion includes a handle that replaces an original handle of the carrier,

wherein the bottom portion and the top portion include clearance holes positioned to align with holes within the enclosure for receiving mounting mechanism used to affix an original handle to the carrier, and

wherein the replacement component is affixed to the enclosure by the mounting mechanism by way of the clearance holes and the holes within the enclosure.

17. A handle for a carrier for storing items sensitive to environmental parameters, the handle comprising:

a housing; and

a device having a sensor for sensing one or more environmental parameters mounted entirely within the housing,

wherein the handle is sized to replace an original handle of the carrier.

18. A method for retrofitting a carrier to include a device for sensing one or more environmental parameters, the method comprising:

providing a carrier having an enclosure for storing articles sensitive to electrostatic discharge (ESD), wherein the carrier includes an original component that is affixed to the enclosure as an integral component of the carrier;

removing the original component from the carrier; and

replacing the original component with a replacement component, wherein the replacement component includes a housing that provides an enclosure for the device having a sensor for sensing the one or more environmental parameters.

19. An automation system for a semiconductor manufacturing environment comprising:

a plurality of carriers for storing articles used within the semiconductor manufacturing environment; and

an automation system for gripping and moving the plurality of carriers, wherein the carriers conform to an industry-standard form factor required by the automation system,

wherein each of the carriers comprises;

an enclosure for storing one or more of the articles; and

a replacement component that is affixed to the enclosure as an integral component of the carrier,

wherein the replacement component comprises a housing that provides an enclosure for a device having a sensor for sensing one or more environmental parameters, wherein at least one of the environmental parameters comprises an ESD parameter; and

wherein the replacement component is affixed to the enclosure at a position and orientation to replace an original component of the carrier without substantially changing the form factor of the carrier.

20. A carrier comprising:

an enclosure for storing articles sensitive to electrostatic discharge (ESD); and

a handle comprising;

a housing, and

a device having a sensor for sensing one or more environmental parameters mounted entirely within the housing,

wherein the handle is sized and positioned with respect to the enclosure to replace an original handle of the carrier.