SINGLE-CHANNEL OPTICAL PROCESSING SYSTEM FOR ENERGETIC-BEAM MICROSCOPES

• US 20100051802A1
• Filed: 08/29/2008
• Published: 03/04/2010
• Est. Priority Date: 08/29/2008
• Status: Active Grant

• Current Assignee: Oxford Instruments America Incorporated (Oxford Instruments PLC)
• Original Assignee: Omniprobe Inc. (Oxford Instruments PLC)
• Inventors: Moore, Thomas M., Marchman, Herschel M., Kruger, Rocky
• Granted Patent: US 7,961,397 B2
• Time in Patent Office: Days
• US Class Current: 250/306
• CPC Class Codes: H01J 2237/2482 Optical means
• CPC Class Codes: H01J 2237/317 Processing objects on a microscale
• CPC Class Codes: H01J 2237/31749 Focused ion beam
• CPC Class Codes: H01J 37/226 Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
• CPC Class Codes: H01J 37/3045 Object or beam position registration

Abstract

A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.

Claims

1. A single-channel optical processing system for an energetic-beam instrument;

the system comprising;

a first optical path for processing radiation;

a second optical path for illumination radiation;

a combiner;

the combiner oriented so that

the first optical path and the second optical path are incident on the combiner; and

,

the illumination radiation and the processing radiation pass through the combiner and exit the combiner along a same optical path as combined incident radiation;

a polarizer positioned in the optical path of the combined incident radiation;

a beam splitter positioned in the optical path of the combined incident radiation following the polarizer;

the beam splitter oriented so that the combined incident radiation passes directly through it;

a quarter-wave plate located in the optical path of the combined incident radiation, following the beam splitter;

a self-focusing rod lens, the rod lens having first and second ends;

the self-focusing rod lens located in the optical path of the combined incident radiation following the quarter-wave plate,

so that the combined incident radiation enters the first end of the self-focusing rod lens and exits from the second end thereof;

the second end of the self-focusing rod lens located in the vacuum chamber of the energetic-beam instrument,

so as to allow a sample surface located in the vacuum chamber of the energetic-beam instrument to be illuminated by the combined incident radiation;

the self-focusing rod lens further located to receive at the second end thereof at least a portion of the combined incident radiation reflected from the sample surface;

the self-focusing rod lens further located so that

the portion of the reflected combined radiation received by the self-focusing rod lens exits from the first end of the self-focusing rod lens, passes through the quarter-wave plate and enters the beam splitter; and

,

the beam splitter further oriented so as to reflect the reflected combined radiation at an angle from the optical path of the reflected combined radiation exiting the self-focusing rod lens.

2. The single-channel optical processing system of claim 1, further comprising:

an optical detector located in the optical path of the reflected combined radiation exiting from the beam splitter.

3. The single-channel optical processing system of claim 2, where the optical detector is a camera.

4. The single-channel optical processing system of claim 2, where the optical detector is a spectrometer.

5. The single-channel optical processing system of claim 1, further comprising a half-wave plate located in the first optical path before the combiner, for variably reducing the transmission of the processing radiation through the combiner.

6. The single-channel optical processing system of claim 1, further comprising an aperture;

the aperture located in the optical path of the combined incident radiation before the beam splitter.

7. The single-channel optical processing system of claim 1, further comprising an objective lens;

the objective lens located adjacent to the second end of the self-focusing rod lens.

8. The single-channel optical processing system of claim 1, further comprising:

a second polarizer;

the second polarizer located in the optical path of the reflected combined radiation between the beam splitter and the optical detector.

9. The single-channel optical processing system of claim 8, where the second polarizer is a Glan-laser polarizer.

10. The single-channel optical processing system of claim 1, further comprising:

a narrow-band filter;

the narrow-band filter located in the optical path of the reflected combined radiation and the optical detector.

11. The single-channel optical processing system of claim 1, where the combiner is a dichroic mirror.

12. The single-channel optical processing system of claim 1, further comprising:

the self-focusing rod lens having a central axis;

a source of illumination radiation located inside the energetic-beam instrument so as to provide illumination to the sample surface at an angle off the central axis of the self-focusing rod lens.

13. A single-channel optical processing system for an energetic-beam instrument;

the system comprising;

an optical path for illumination radiation;

a polarizer positioned in the optical path for illumination radiation;

a beam splitter positioned in the optical path for illumination radiation following the polarizer;

the beam splitter oriented so that illumination radiation passes directly through it on the same optical path;

a quarter-wave plate located in the optical path for illumination radiation, following the beam splitter;

a self-focusing rod lens, the rod lens having first and second ends;

the self-focusing rod lens located in the optical path for illumination radiation following the quarter-wave plate,

so that the illumination radiation enters the first end of the self-focusing rod lens and exits from the second end thereof;

the second end of the self-focusing rod lens located in the vacuum chamber of the energetic-beam instrument,

so as to allow a sample surface located in the vacuum chamber of the energetic-beam instrument to be illuminated by the illumination radiation;

the self-focusing rod lens further located to receive at the second end thereof at least a portion of the illumination radiation reflected from the sample surface;

the self-focusing rod lens further located so that

the portion of the reflected illumination radiation received by the self-focusing rod lens exits from the first end of the self-focusing rod lens, passes through the quarter-wave plate and enters the beam splitter; and

,

the beam splitter further oriented so as to reflect the reflected illumination radiation at an angle from the optical path of the reflected illumination radiation exiting the self-focusing rod lens.

14. The single-channel optical processing system of claim 13, further comprising:

an optical detector located in the optical path of the reflected illumination radiation exiting from the beam splitter.

15. The single-channel optical processing system of claim 14, where the optical detector is a camera.

16. The single-channel optical processing system of claim 14, where the optical detector is a spectrometer.

17. The single-channel optical processing system of claim 13, further comprising an aperture;

the aperture located in the optical path for illumination radiation before the beam splitter.

18. The single-channel optical processing system of claim 13, further comprising an objective lens;

the objective lens located adjacent to the second end of the self-focusing rod lens.

19. The single-channel optical processing system of claim 13, further comprising:

a second polarizer;

the second polarizer located in the optical path of the reflected illumination radiation between the beam splitter and the optical detector.

20. The single-channel optical processing system of claim 13, further comprising:

the self-focusing rod lens having a central axis;

a source of illumination radiation located inside the energetic-beam instrument so as to provide illumination to the sample surface at an angle off the central axis of the self-focusing rod lens.

21. A single-channel optical processing system for an energetic-beam instrument;

the system comprising;

a first optical path for processing radiation;

a second optical path for illumination radiation;

a dichroic mirror;

the dichroic mirror oriented so that

the illumination radiation and the processing radiation pass through the dichroic mirror and exit the dichroic mirror along the same optical path as combined incident radiation;

a polarizer positioned in the optical path of the combined incident radiation;

a beam splitter positioned in the optical path of the combined incident radiation following the polarizer;

the beam splitter oriented so that the combined incident radiation passes directly through it;

a quarter-wave plate located in the optical path of the combined incident radiation, following the beam splitter;

a self-focusing rod lens, the rod lens having first and second ends;

the self-focusing rod lens located in the optical path of the combined incident radiation following the quarter-wave plate,

so that the combined incident radiation enters the first end of the self-focusing rod lens and exits from the second end thereof;

the second end of the self-focusing rod lens located in the vacuum chamber of the energetic-beam instrument,

so as to allow a sample surface located in the vacuum chamber of the energetic-beam instrument to be illuminated by the combined incident radiation;

the self-focusing rod lens further located to receive at the second end thereof at least a portion of the combined incident radiation reflected from the sample surface;

the self-focusing rod lens further located so that

the portion of the reflected combined radiation received by the self-focusing rod lens exits from the first end of the self-focusing rod lens, passes through the quarter-wave plate and enters the beam splitter; and

,

the beam splitter further oriented so as to reflect the reflected combined radiation at an angle from the optical path of the reflected combined radiation exiting the self-focusing rod lens.

22. The single-channel optical processing system of claim 21, further comprising:

an optical detector located in the optical path of the reflected combined radiation exiting from the beam splitter

23. The single-channel optical processing system of claim 22, where the optical detector is a camera.

24. The single-channel optical processing system of claim 22, where the optical detector is a spectrometer.

25. The single-channel optical processing system of claim 21, further comprising an aperture;

the aperture located in the optical path of the combined incident radiation before the beam splitter.

26. The single-channel optical processing system of claim 21, further comprising an objective lens;

the objective lens located adjacent to the second end of the self-focusing rod lens.

27. The single-channel optical processing system of claim 21, where the polarizer is a Glan-laser polarizer.

28. The single-channel optical processing system of claim 21, further comprising:

a second polarizer;

the second polarizer located in the optical path of the reflected combined incident radiation between the beam splitter and the optical detector.

29. The single-channel optical processing system of claim 21, further comprising:

a narrow-band filter;

the narrow-band filter located in the optical path of the reflected combined radiation and the optical detector.

30. The single-channel optical processing system of claim 21, further comprising:

the self-focusing rod lens having a central axis;

a source of illumination radiation located inside the energetic-beam instrument so as to provide illumination to the sample surface at an angle off the central axis of the self-focusing rod lens.

31. A single-channel optical processing system for an energetic-beam instrument;

the system comprising;

a first optical path for processing radiation;

the first optical path comprising a first optical fiber;

a second optical path for illumination radiation;

the second optical path comprising a second optical fiber;

a combiner;

the first optical fiber located so that processing radiation exiting therefrom enters a first face of the combiner;

the second optical fiber located so that processing radiation exiting therefrom enters a second face of the combiner;

the combiner oriented so that

the illumination radiation and the processing radiation pass through the combiner and exit the combiner along a same optical path as combined incident radiation;

a polarizer positioned in the optical path of the combined incident radiation;

a beam splitter positioned in the optical path of the combined incident radiation following the polarizer;

the beam splitter oriented so that the combined incident radiation passes directly through it;

a quarter-wave plate located in the optical path of the combined incident radiation, following the beam splitter;

a self-focusing rod lens, the rod lens having first and second ends;

the self-focusing rod lens located in the optical path of the combined incident radiation following the quarter-wave plate,

so that the combined incident radiation enters the first end of the self-focusing rod lens and exits from the second end thereof;

the second end of the self-focusing rod lens located in the vacuum chamber of the energetic-beam instrument,

so as to allow a sample surface located in the vacuum chamber of the energetic-beam instrument to be illuminated by the combined incident radiation;

the self-focusing rod lens further located to receive at the second end thereof at least a portion of the combined incident radiation reflected from the sample surface;

the self-focusing rod lens further located so that

the portion of the reflected combined radiation received by the self-focusing rod lens exits from the first end of the self-focusing rod lens, passes through the quarter-wave plate and enters the beam splitter; and

,

the beam splitter further oriented so as to reflect the reflected combined radiation at an angle from the optical path of the reflected combined radiation exiting the self-focusing rod lens.

32. The single-channel optical processing system of claim 31, further comprising:

an optical detector located in the optical path of the reflected combined radiation exiting from the beam splitter.

33. The single-channel optical processing system of claim 32, where the optical detector is a camera.

34. The single-channel optical processing system of claim 32, where the optical detector is a spectrometer.

35. The single-channel optical processing system of claim 31, further comprising an aperture;

the aperture located in the optical path of the combined incident radiation before the beam splitter.

36. The single-channel optical processing system of claim 31, further comprising an objective lens;

the objective lens located adjacent to the second end of the self-focusing rod lens.

37. The single-channel optical processing system of claim 31, further comprising:

a second polarizer;

the second polarizer located in the optical path of the reflected combined radiation between the beam splitter and the optical detector.

38. The single-channel optical processing system of claim 31, further comprising:

a narrow-band filter;

the narrow-band filter located in the optical path of the reflected combined radiation and the optical detector.

39. The single-channel optical processing system of claim 31, where the combiner is a dichroic mirror.

40. The single-channel optical processing system of claim 31, further comprising:

the self-focusing rod lens having a central axis;

a source of illumination located inside the energetic-beam instrument so as to provide illumination to the sample surface at an angle off the axis of the self-focusing rod lens.