ION SOURCE
First Claim
1. An ion source for generating an ion beam containing an aluminum ion, comprising:
- a plasma generating chamber which is also used as an anode and generates a plasma in an interior, and into which an ionization gas containing fluorine is introduced;
a hot cathode provided on one side in the plasma generating chamber and isolated electrically from the plasma generating chamber;
an opposing reflecting electrode which is provided on other side in the plasma generating chamber to oppose to the hot cathode and is isolated electrically from the plasma generating chamber, to which a voltage that is negative in contrast to a potential of the plasma generating chamber is applied, and which reflects electrons in the plasma generating chamber and is formed of an aluminum containing material; and
a magnet which generates a magnetic field along a line connecting the hot cathode and the opposing reflecting electrode, in the plasma generating chamber.
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Accused Products
Abstract
An ion source includes a plasma generating chamber into which an ionization gas containing fluorine is introduced, a hot cathode provided on one side in the plasma generating chamber, an opposing reflecting electrode which is provided on other side in the plasma generating chamber and reflects electrons when a negative voltage is applied from a bias power supply to the opposing reflecting electrode, and a magnet for generating a magnetic field along a line, which connects the hot cathode and the opposing reflecting electrode, in the plasma generating chamber. The opposing reflecting electrode is formed of an aluminum containing material.
50 Citations
12 Claims
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1. An ion source for generating an ion beam containing an aluminum ion, comprising:
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a plasma generating chamber which is also used as an anode and generates a plasma in an interior, and into which an ionization gas containing fluorine is introduced; a hot cathode provided on one side in the plasma generating chamber and isolated electrically from the plasma generating chamber; an opposing reflecting electrode which is provided on other side in the plasma generating chamber to oppose to the hot cathode and is isolated electrically from the plasma generating chamber, to which a voltage that is negative in contrast to a potential of the plasma generating chamber is applied, and which reflects electrons in the plasma generating chamber and is formed of an aluminum containing material; and a magnet which generates a magnetic field along a line connecting the hot cathode and the opposing reflecting electrode, in the plasma generating chamber. - View Dependent Claims (3, 5, 7, 9, 11)
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2. An ion source for generating an ion beam containing an aluminum ion, comprising:
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a plasma generating chamber which is also used as an anode and generates a plasma in an interior, and into which an ionization gas containing fluorine is introduced; a hot cathode provided on one side in the plasma generating chamber and isolated electrically from the plasma generating chamber; an opposing reflecting electrode which is provided on other side in the plasma generating chamber to oppose to the hot cathode and is isolated electrically from the plasma generating chamber, which is set at a floating potential, and which reflects electrons in the plasma generating chamber and is formed of an aluminum containing material; and a magnet which generates a magnetic field along a line connecting the hot cathode and the opposing reflecting electrode, in the plasma generating chamber. - View Dependent Claims (4, 6, 8, 10, 12)
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Specification