METHOD FOR FORMING PATTERN, THIN FILM TRANSISTOR, DISPLAY DEVICE, METHOD FOR MANUFACTURING THEREOF, AND TELEVISION APPARATUS
First Claim
1. A thin film transistor comprising:
- a first conductive layer provided over a light-transmitting substrate;
an insulating layer over the substrate and the first conductive layer;
a photocatalyst provided over the insulating layer;
a material containing a fluorocarbon chain over the photocatalyst;
a first region and a second region in a surface of the material containing the fluorocarbon chain; and
a second conductive layer over the second region,wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region.
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Abstract
To provide a display device which can be manufactured with higher efficiency in the use of material through a simplified manufacturing process, and a method for manufacturing the display device. Another object is to provide a technique by which patterns of a wiring the like which constitutes the display device can be formed to a desired shape with good control. In a method for forming a pattern according to the present invention, a mask is formed over a light-transmitting substrate; a first region including a photocatalyst is formed over the substrate and the mask; the photocatalyst is irradiated with light through the substrate to modify a part of the first region; a second region is formed; and a composition containing a pattern forming material is discharged to the second region, thus, a pattern is formed. The mask does not transmit light.
109 Citations
12 Claims
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1. A thin film transistor comprising:
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a first conductive layer provided over a light-transmitting substrate; an insulating layer over the substrate and the first conductive layer; a photocatalyst provided over the insulating layer; a material containing a fluorocarbon chain over the photocatalyst; a first region and a second region in a surface of the material containing the fluorocarbon chain; and a second conductive layer over the second region, wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region. - View Dependent Claims (2)
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3. A thin film transistor comprising:
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a first conductive layer provided over a light-transmitting substrate; an insulating layer over the substrate and the first conductive layer; a photocatalyst provided over the insulating layer; a material containing a fluorocarbon chain over the photocatalyst; a first region and a second region in a surface of the material containing the fluorocarbon chain; a second conductive layer over the second region; and a semiconductor layer formed over the material containing the fluorocarbon chain and the second electrode layer, wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region. - View Dependent Claims (4)
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5. A display device comprising:
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a gate electrode layer provided over a light-transmitting substrate; an insulating layer over the substrate and the gate electrode layer; a photocatalyst provided over the insulating layer; a material containing a fluorocarbon chain over the photocatalyst; a first region and a second region in a surface of the material containing the fluorocarbon chain; and a source electrode layer and a drain electrode layer over the second region, wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region. - View Dependent Claims (6)
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7. A display device comprising:
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a gate electrode layer provided over a light-transmitting substrate; an insulating layer over the substrate and the gate electrode layer; a photocatalyst provided over the insulating layer; a material containing a fluorocarbon chain over the photocatalyst; a first region and a second region in a surface of the material containing the fluorocarbon chain; a source electrode layer and a drain electrode layer over the second region; and a semiconductor layer formed over the material containing the fluorocarbon chain and the source electrode layer and the drain electrode layer, wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region. - View Dependent Claims (8)
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9. A television apparatus comprising a display screen constituted by a display device;
- the display device including;
a gate electrode layer provided over a light-transmitting substrate; an insulating layer over the substrate and the gate electrode layer; a photocatalyst provided over the insulating layer; a material containing a fluorocarbon chain over the photocatalyst; a first region and a second region in a surface of the material containing the fluorocarbon chain; and a source electrode layer and a drain electrode layer over the second region, wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region. - View Dependent Claims (10)
- the display device including;
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11. A television apparatus comprising a display screen constituted by a display device;
- the display device including;
a gate electrode layer provided over a light-transmitting substrate; an insulating layer over the substrate and the gate electrode layer; a photocatalyst provided over the insulating layer; a material containing a fluorocarbon chain over the photocatalyst; a first region and a second region in a surface of the material containing the fluorocarbon chain; a source electrode layer and a drain electrode layer over the second region; and a semiconductor layer formed over the material containing the fluorocarbon chain and the source electrode layer and the drain electrode layer, wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region. - View Dependent Claims (12)
- the display device including;
Specification