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SYSTEM FOR ISOLATING AN EXPOSURE APPARATUS

  • US 20100053589A1
  • Filed: 08/27/2009
  • Published: 03/04/2010
  • Est. Priority Date: 09/04/2008
  • Status: Active Grant
First Claim
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1. A precision assembly for fabricating a substrate, the precision assembly being supported by a mounting base, the precision assembly comprising:

  • a precision fabrication apparatus adapted for fabricating the substrate;

    a pedestal assembly that supports at least a portion of the precision fabrication apparatus; and

    a suspension system that inhibits the transfer of motion between the mounting base and the pedestal assembly, the suspension system including (i) a first boom that is coupled to the mounting base and the pedestal assembly, the first boom being pivotable coupled to at least one of the mounting base and the pedestal assembly, and (ii) a first resilient assembly that is coupled between the mounting base and at least one of the first boom and the pedestal assembly.

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