SYSTEM FOR ISOLATING AN EXPOSURE APPARATUS
First Claim
1. A precision assembly for fabricating a substrate, the precision assembly being supported by a mounting base, the precision assembly comprising:
- a precision fabrication apparatus adapted for fabricating the substrate;
a pedestal assembly that supports at least a portion of the precision fabrication apparatus; and
a suspension system that inhibits the transfer of motion between the mounting base and the pedestal assembly, the suspension system including (i) a first boom that is coupled to the mounting base and the pedestal assembly, the first boom being pivotable coupled to at least one of the mounting base and the pedestal assembly, and (ii) a first resilient assembly that is coupled between the mounting base and at least one of the first boom and the pedestal assembly.
2 Assignments
0 Petitions
Accused Products
Abstract
A precision assembly (10) for fabricating a substrate (42) includes a precision fabrication apparatus (12), a pedestal assembly (14) and a suspension system (16). The precision fabrication apparatus (12) fabricates the substrate (42). The pedestal assembly (14) supports at least a portion of the fabrication apparatus (12). The suspension system (16) inhibits the transfer of motion between the mounting base (20) and the pedestal assembly (14). The suspension system (16) can include (i) a first boom (380) that is coupled to the mounting base (20) and the pedestal assembly (14), the first boom (380) being pivotable coupled to at least one of the mounting base (20) and the pedestal assembly (14), and (ii) a first resilient assembly (382) that is coupled between the mounting base (20) and at least one of the first boom (380) and the pedestal assembly (14). The first resilient assembly (382) can function similar to a zero length spring over an operational range of the resilient assembly (382). With this design, the components of the precision fabrication apparatus (12) are better protected by the suspension system (16) during a seismic disturbance. This reduces the likelihood of damage and misalignment of the components of the precision fabrication apparatus (12) during the seismic disturbance.
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Citations
39 Claims
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1. A precision assembly for fabricating a substrate, the precision assembly being supported by a mounting base, the precision assembly comprising:
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a precision fabrication apparatus adapted for fabricating the substrate; a pedestal assembly that supports at least a portion of the precision fabrication apparatus; and a suspension system that inhibits the transfer of motion between the mounting base and the pedestal assembly, the suspension system including (i) a first boom that is coupled to the mounting base and the pedestal assembly, the first boom being pivotable coupled to at least one of the mounting base and the pedestal assembly, and (ii) a first resilient assembly that is coupled between the mounting base and at least one of the first boom and the pedestal assembly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. An isolation system for inhibiting the transfer of motion between a first object and a second object, the isolation system comprising:
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a pedestal assembly on which the first object is mounted; and a suspension assembly coupling the pedestal assembly and the second object, the suspension assembly supporting the pedestal assembly with substantially zero stiffness. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method for inhibiting the transfer of motion between a first object and a second object, the method comprising the steps of:
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mounting the first objection onto a pedestal assembly; and coupling the pedestal assembly to the second object with a suspension assembly that supports the pedestal assembly with substantially zero stiffness. - View Dependent Claims (35, 36, 37, 38)
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39. A resilient mechanism for inhibiting the transfer of motion between a first object and a second object, the resilient mechanism comprising:
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a boom connector that is fixedly secured to the first object; a boom that pivotable cantilevers from the boom connector, the boom being adapted to be coupled to the second object; a movable mount that is movable relative to the boom connector; and a boom first resilient assembly that is coupled between the movable mount and the boom.
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Specification