PROCESS OF PATTERNING SMALL SCALE DEVICES
First Claim
1. A process comprising:
- forming a first mask on an underlying layer, the mask having two adjacent portions with an open gap therebetween; and
depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask.
5 Assignments
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Accused Products
Abstract
A process is provided that includes forming a first mask on an underlying layer, where the mask has two adjacent portions with an open gap therebetween, and depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask. In another implementation, a process is provided that includes forming a first mask on an underlying layer, where the mask has a pattern that includes an open gap, and depositing a second mask material within the open gap to form a second mask, where particles of the second mask material are directed in parallel or substantially in parallel to a line at an inclined angle with respect to an upper surface of the underlying layer.
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Citations
20 Claims
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1. A process comprising:
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forming a first mask on an underlying layer, the mask having two adjacent portions with an open gap therebetween; and depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A process comprising:
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forming a first mask on an underlying layer, the mask having a pattern that includes an open gap; and depositing a second mask material within the open gap to form a second mask, wherein particles of the second mask material are directed in parallel or substantially in parallel to a line at an inclined angle with respect to an upper surface of the underlying layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification