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PROCESS OF PATTERNING SMALL SCALE DEVICES

  • US 20100055577A1
  • Filed: 08/29/2008
  • Published: 03/04/2010
  • Est. Priority Date: 08/29/2008
  • Status: Active Grant
First Claim
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1. A process comprising:

  • forming a first mask on an underlying layer, the mask having two adjacent portions with an open gap therebetween; and

    depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask.

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