AUTOMATED MODEL BUILDING AND BATCH MODEL BUILDING FOR A MANUFACTURING PROCESS, PROCESS MONITORING, AND FAULT DETECTION
First Claim
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1. A method for creating a new model of a manufacturing process according to a multivariate analysis, the method comprising:
- selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process;
determining a set of model generation conditions based on the set of data; and
generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.
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Abstract
A method for creating a new model of a manufacturing process according to a multivariate analysis including selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process. The method also includes determining a set of model generation conditions based on the set of data and generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.
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Citations
21 Claims
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1. A method for creating a new model of a manufacturing process according to a multivariate analysis, the method comprising:
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selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process; determining a set of model generation conditions based on the set of data; and generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A system for generating data structures indicative of conditions of a manufacturing process or current quality of output of a manufacturing process, the system comprising:
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a data supply module for communication with a set of manufacturing tools used for the manufacturing process and for communication with a memory including one or more previously-generated data structures; a data management module in communication with the data supply module, for receiving data about the manufacturing process from the data supply module and for filtering or scaling the received data; and a model generation module in communication with the data management module or data supply module for generating a model including a set of data associated with the manufacturing process based on the data and a set of user-specified conditions. - View Dependent Claims (18, 19)
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20. A system for creating or updating a model according to a multivariate analysis, the system comprising:
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a user interface including; (a) a first window allowing a user to select raw data or data from a previously-generated model to be used to generate a new model; (b) a second window allowing a user to determine model generation specifications including data to be included in the generated model and data to be excluded from the generated model; (c) an area for displaying the data to be used to generate the model; and (d) a user-responsive command portion to provide an instruction to a model generation module upon selection by the user for generating the model; and a memory for storing the generated model. - View Dependent Claims (21)
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Specification