CLASSIFICATION OF SPATIAL PATTERNS ON WAFER MAPS
First Claim
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1. A method comprising:
- applying K-means type clustering to wafer maps comprising one or more spatial patterns to group one or more clusters comprising wafer maps having similar spatial patterns; and
producing a dendrogram using a clustering process to display the one or more clusters.
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Abstract
Classification of spatial patterns on wafer maps is generally described. In one example, a method includes applying K-means type clustering to wafer maps comprising one or more spatial patterns to group one or more clusters comprising wafer maps having similar spatial patterns and producing a dendrogram using a clustering process to display the one or more clusters.
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20 Claims
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1. A method comprising:
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applying K-means type clustering to wafer maps comprising one or more spatial patterns to group one or more clusters comprising wafer maps having similar spatial patterns; and producing a dendrogram using a clustering process to display the one or more clusters. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 13, 14)
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11. An article of manufacture comprising a storage medium having instructions stored thereon that, if executed, result in:
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applying K-means type clustering to wafer maps comprising one or more spatial patterns to group one or more clusters comprising wafer maps having similar spatial patterns; and producing a dendrogram using a clustering process to display the one or more clusters. - View Dependent Claims (12, 15, 16, 17, 18, 19, 20)
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Specification