MANUFACTURING METHOD FOR A ROTATION SENSOR DEVICE AND ROTATION SENSOR DEVICE
First Claim
1. A manufacturing method for a rotation sensor device having a holding device, an oscillating mass, and at least one spring, via which the oscillating mass is connected to the holding device, the at least one spring being designed in such a way that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive, having the following steps:
- producing a layer sequence having a first layer made of a semiconductor material and/or a metal and a second layer made of a semiconductor material and/or a metal, a boundary surface of the first layer, which faces toward the second layer, being at least partially covered by an insulating layer;
structuring the at least one spring out of the first layer; and
structuring at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of the drive, out of the second layer.
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Accused Products
Abstract
A device and manufacturing method for a rotation sensor device includes a holding device, an oscillating mass, and a spring, via which the oscillating mass is connected to the holding device. The spring is designed so that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive. The steps include: producing a layer sequence having a first layer made of semiconductor material and/or metal and a second layer made of semiconductor material and/or a metal, a boundary surface of the first layer, at least partially being covered by an insulating layer; structuring the spring out of the first layer; and structuring at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of the drive, out of the second layer.
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Citations
15 Claims
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1. A manufacturing method for a rotation sensor device having a holding device, an oscillating mass, and at least one spring, via which the oscillating mass is connected to the holding device, the at least one spring being designed in such a way that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive, having the following steps:
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producing a layer sequence having a first layer made of a semiconductor material and/or a metal and a second layer made of a semiconductor material and/or a metal, a boundary surface of the first layer, which faces toward the second layer, being at least partially covered by an insulating layer; structuring the at least one spring out of the first layer; and structuring at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of the drive, out of the second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A rotation sensor device, comprising:
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a holding device; an oscillating mass; and at least one spring, via which the oscillating mass is connected to the holding device, the at least one spring being designed in such a way that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive; wherein the at least one spring has a first height along the oscillation axis and at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of a drive, has a second height unequal to the first height. - View Dependent Claims (12, 13, 14, 15)
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Specification