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MANUFACTURING METHOD FOR A ROTATION SENSOR DEVICE AND ROTATION SENSOR DEVICE

  • US 20100058863A1
  • Filed: 09/02/2009
  • Published: 03/11/2010
  • Est. Priority Date: 09/02/2008
  • Status: Active Grant
First Claim
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1. A manufacturing method for a rotation sensor device having a holding device, an oscillating mass, and at least one spring, via which the oscillating mass is connected to the holding device, the at least one spring being designed in such a way that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive, having the following steps:

  • producing a layer sequence having a first layer made of a semiconductor material and/or a metal and a second layer made of a semiconductor material and/or a metal, a boundary surface of the first layer, which faces toward the second layer, being at least partially covered by an insulating layer;

    structuring the at least one spring out of the first layer; and

    structuring at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of the drive, out of the second layer.

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