MEMS Sensor with Movable Z-Axis Sensing Element
First Claim
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1. A MEMS sensor comprising:
- a substrate;
a MEMS structure coupled to the substrate and having a mass movable with respect to the substrate; and
a reference structure radially outward from the MEMS structure.
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Abstract
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
34 Citations
20 Claims
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1. A MEMS sensor comprising:
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a substrate; a MEMS structure coupled to the substrate and having a mass movable with respect to the substrate; and a reference structure radially outward from the MEMS structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of producing a MEMS sensor, the method comprising:
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providing a substrate; forming a MEMS structure coupled to the substrate and having a mass movable with respect to the substrate; and forming a reference structure radially outward from the MEMS structure. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of measuring motion in a z-axis using a MEMS sensor, the method comprising:
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providing a substrate having a z-plane MEMS electrode on the substrate; providing a MEMS structure substantially above the z-plane MEMS electrode, the MEMS structure coupled to the substrate and having a mass movable with respect to the substrate; providing a reference structure radially outward from the MEMS structure, the reference structure electrically coupled to the movable mass to form a sensing element; applying a potential to the z-plane MEMS electrode; and measuring a change in capacitance between the sensing element and the z-plane MEMS electrode using the sensing element. - View Dependent Claims (19, 20)
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Specification