Method of manufacturing semiconductor device and cleaning apparatus
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Abstract
The disclosure concerns a manufacturing method of a semiconductor device includes dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution onto the semiconductor substrate; measuring a specific resistance or a conductivity of the supplied solution; and supplying a removal solution for removing the etching residual material onto the semiconductor substrate for a predetermined period of time based on the specific resistance or the conductivity of the solution, when an etching residual material adhering to the semiconductor substrate or the structure is removed.
9 Citations
16 Claims
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1-11. -11. (canceled)
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12. A cleaning apparatus comprising:
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a stage rotating a semiconductor substrate to which an etching residual material adheres, the stage controlling a temperature of the semiconductor substrate; a first nozzle which discharges a solution onto a surface of the semiconductor substrate; a measuring unit which measures a specific resistance or a conductivity of the solution discharged onto the semiconductor substrate; a processing unit which determines time for supplying the removal solution onto the semiconductor substrate on the basis of the specific resistance or the conductivity of the solution; and a second nozzle which discharges a removal solution for removing the etching residual material depending on the time determined by the processing unit. - View Dependent Claims (13, 14, 15, 16)
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Specification