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IMAGE SENSOR WITH RAISED PHOTOSENSITIVE ELEMENTS

  • US 20100059802A1
  • Filed: 09/11/2008
  • Published: 03/11/2010
  • Est. Priority Date: 09/11/2008
  • Status: Active Grant
First Claim
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1. A method of forming an image sensor having a pixel array, the method comprising the steps of:

  • forming periphery elements of the image sensor over a substrate;

    forming an oxide layer over the periphery elements;

    forming an opening in the oxide layer in a pixel array area;

    forming an epitaxial layer in the opening; and

    forming photosensitive elements of the pixel array in the epitaxial layer.

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