COMPLIANT BASE TO INCREASE CONTACT FOR MICRO- OR NANO-FIBERS
First Claim
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1. A fabricated microstructure, comprising:
- a substrate;
a primary fiber having a width less than about 5 microns; and
a plurality of base fibers, each base fiber having a first end attached to the primary fiber and a second end attached to the substrate, wherein each base fiber has a width less than the width of the primary fiber.
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Abstract
A fabricated microstructure includes a substrate, a primary fiber, and a plurality of base fibers. The primary fiber has a width less than about 5 microns. Each base fiber of the plurality of base fibers has a first end attached to the primary fiber and a second end attached to the substrate. Each base fiber has a width less than the width of the primary fiber.
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Citations
38 Claims
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1. A fabricated microstructure, comprising:
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a substrate; a primary fiber having a width less than about 5 microns; and a plurality of base fibers, each base fiber having a first end attached to the primary fiber and a second end attached to the substrate, wherein each base fiber has a width less than the width of the primary fiber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a microstructure having a plurality of micro- or nano-fibers attached to a compliant substrate, comprising:
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stacking a first porous mold on a second porous mold, wherein the first and second porous molds have different pore sizes, and wherein the first and second porous molds are shaped to form a plurality of primary fibers, each primary fiber having a width less than about 5 microns, and each primary fiber having a plurality of base fibers, wherein each base fiber has a width less than the width of the primary fiber; filling the stacked first and second porous molds with polymer; curing the polymer; after curing the polymer, etching away the first and second porous molds; and cutting the polymer using a cutting beam.
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13. A fabricated microstructure, comprising:
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a substrate; and a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a first double-cantilever structure, and wherein the first double-cantilever structure comprises two parallel sides separated by a gap, wherein the first double-cantilever structure permits compliance of the fiber at the base in a first direction perpendicular to the two parallel sides of the first double-cantilever structure. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A fabricated microstructure, comprising:
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a substrate; and a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a spring structure, and wherein spring structure permits rotational compliance of the fiber at the base. - View Dependent Claims (24, 25, 26)
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27. A fabricated microstructure, comprising:
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a substrate; and a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a flexure support structure, and wherein the flexure support structure permits rotational compliance of the fiber at the base. - View Dependent Claims (28, 29)
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30. A method of fabricating a microstructure having a plurality of micro- or nano-fibers attached to a compliant substrate, comprising:
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inserting a template having an array of holes into the compliant substrate; applying material for the fibers on top of the template; planarizing the top of the template after the material for the fibers has been applied; and removing the template to release the fibers. - View Dependent Claims (31, 32, 33, 34, 35, 36)
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37. A fabricated microstructure, comprising:
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a substrate; and a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, and wherein the substrate is formed from a compliant material. - View Dependent Claims (38)
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Specification