Monolithic Comb Drive System and method for Large-Deflection Multi-Dof Microtransduction
First Claim
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1. A scanning probe microscope apparatus comprising:
- a probe tip coupled to a first plate moveable in an x-axis direction, a y-axis direction and a z-axis direction;
a first actuator configured to move the plate and the probe tip in the y-axis direction;
a second actuator configured to move the plate and the probe tip in a z-axis direction; and
a third actuator configured to move the probe tip in the x-axis direction, the first, second and third actuators cooperating to move the probe tip with three degrees of freedom of movement.
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Abstract
A scanning probe microscope includes a plate moveable in an x-axis direction, a y-axis direction, and a z-axis direction, and a probe tip coupled to the plate. A plurality of actuators cooperate to move the probe tip with three degrees of freedom of movement.
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Citations
20 Claims
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1. A scanning probe microscope apparatus comprising:
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a probe tip coupled to a first plate moveable in an x-axis direction, a y-axis direction and a z-axis direction; a first actuator configured to move the plate and the probe tip in the y-axis direction; a second actuator configured to move the plate and the probe tip in a z-axis direction; and a third actuator configured to move the probe tip in the x-axis direction, the first, second and third actuators cooperating to move the probe tip with three degrees of freedom of movement. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A scanning probe microscope apparatus comprising:
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first and second anchors rigidly coupled to a substrate; first and second flexures coupled to the first and second anchors, respectively; a first plate coupled to the first flexure; a second plate coupled to the first plate by at least one third flexure, the second plate being moveable in an x-axis direction, a y-axis direction, and a z-axis direction; a probe tip coupled to the second plate; a third plate coupled to the first plate by at least one connecting structure, the third plate being coupled to the second anchor by the second flexure; a first actuator coupled to the first plate, the first actuator being configured to move the first and second plates and probe tip in the y-axis direction; a second actuator configured to move the third plate, the second plate and probe tip in the z-axis direction; and a third actuator configured to move the second plate and the probe tip in the x-axis direction. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A scanning probe microscope having three degrees of freedom of movement comprising:
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first and second anchors rigidly coupled to a substrate; first and second flexures coupled to the first and second anchors, respectively; a first plate coupled to the first flexure; a first drive actuator coupled to the first plate; an electrode coupled to the first plate; a second plate coupled to the first plate by a third flexure; a third plate coupled to the first plate by at least one structure, the third plate also being coupled to the second anchor by the second flexure; a second drive actuator located between the second and third plates; and a probe tip coupled to the second plate, wherein the first and second flexures and the first drive actuator provide a first degree of freedom of movement of the probe tip, the electrode provides a second degree of freedom of movement of the probe tip, and the third flexure and the second drive actuator provide a third degree of freedom of movement of the probe tip. - View Dependent Claims (17, 18, 19, 20)
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Specification