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Monolithic Comb Drive System and method for Large-Deflection Multi-Dof Microtransduction

  • US 20100064395A1
  • Filed: 06/22/2009
  • Published: 03/11/2010
  • Est. Priority Date: 03/12/2007
  • Status: Active Grant
First Claim
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1. A scanning probe microscope apparatus comprising:

  • a probe tip coupled to a first plate moveable in an x-axis direction, a y-axis direction and a z-axis direction;

    a first actuator configured to move the plate and the probe tip in the y-axis direction;

    a second actuator configured to move the plate and the probe tip in a z-axis direction; and

    a third actuator configured to move the probe tip in the x-axis direction, the first, second and third actuators cooperating to move the probe tip with three degrees of freedom of movement.

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