Micro Laser Assisted Machining
First Claim
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1. A method of machining a workpiece, comprising the steps of:
- causing a portion of the workpiece to undergo high pressure phase transformation to form a high pressure phase transformation portion having altered optical properties from the remainder of the workpiece;
irradiating the high pressure transformation portion with laser radiation which is transmitted through the remainder of the workpiece and reflected or absorbed by the high pressure transformation portion to heat the high pressure transformation portion and cause it to soften; and
plastically deforming the workpiece along the softened high pressure transformation portion.
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Abstract
A method and apparatus (1) for machining a semiconductor or ceramic workpiece (32) causes a portion of the workpiece to undergo high pressure phase transformation to form a high pressure phase transformation portion which has altered optical properties from the remainder of the workpiece. A laser is irradiated on the high pressure transformation portion to heat the high pressure transformation portion and cause it to soften and then the workpiece is plastically deformed, at smaller loads and forces, along the softened portion in order to accomplish the machining of the workpiece with a machining tool (21).
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Citations
14 Claims
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1. A method of machining a workpiece, comprising the steps of:
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causing a portion of the workpiece to undergo high pressure phase transformation to form a high pressure phase transformation portion having altered optical properties from the remainder of the workpiece; irradiating the high pressure transformation portion with laser radiation which is transmitted through the remainder of the workpiece and reflected or absorbed by the high pressure transformation portion to heat the high pressure transformation portion and cause it to soften; and plastically deforming the workpiece along the softened high pressure transformation portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An apparatus for performing high pressure phase transformation machining of a workpiece comprising:
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a laser source for generating laser radiation; a machining tool holder; a machining tool capable of transmitting the laser radiation; a force generating means for bringing the machining tool into contact with the workpiece at a pressure of at least the hardness of the workpiece; and means for effecting relative movement between the workpiece and the machining tool. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification