×

THIN FILM TRANSISTOR HAVING CRYSTALLINE INDIUM OXIDE SEMICONDUCTOR FILM

  • US 20100065835A1
  • Filed: 09/18/2008
  • Published: 03/18/2010
  • Est. Priority Date: 09/17/2008
  • Status: Active Grant
First Claim
Patent Images

1. A thin film transistor having a crystalline indium oxide semiconductor film which is composed mainly of indium oxide and contains a positive trivalent metal oxide, having an atomic ratio of metal element M in the positive trivalent metal oxide to the total amount of indium In in the indium oxide plus the metal element M in the positive trivalent metal oxide M/(M+In) of 0.0001 to 0.1.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×