MICROSCOPE DEVICE

• US 20100067103A1
• Filed: 09/15/2009
• Published: 03/18/2010
• Est. Priority Date: 09/16/2008
• Status: Active Grant

• Current Assignee: Yokogawa Electric Corporation
• Original Assignee: Yokogawa Electric Corporation
• Inventors: Sangu, Hiroyuki
• Granted Patent: US 9,116,353 B2
• Time in Patent Office: Days
• US Class Current: 359/385
• CPC Class Codes: G02B 21/0076 arrangements using fluorescence or luminescence
• CPC Class Codes: G02B 21/008 Details of detection or image processing, including general computer control
• CPC Class Codes: G02B 21/06 Means for illuminating specimens
• CPC Class Codes: G02B 21/14 affording illumination for phase-contrast observation
• CPC Class Codes: G02B 21/16 adapted for ultraviolet illumination ; Fluorescence microscopes G02B21/0076 takes precedence

Abstract

With a microscope device according to the invention, it is possible to acquire information on a deeper part of a living organism than that in the case of a conventional microscope device. The microscope device according to a first invention comprises an illumination optical system for irradiating an object with illumination rays in a line-like form, a detection optical system for receiving light rays generated by the illumination rays. The second invention relates to a microscope device wherein an objective lens of an illumination optical system, and an objective lens of a detection optical system are at respective positions. The third invention relates to a microscope device wherein a separation filter is structured such that a laser beam can pass through only a part (a region) thereof. The fourth invention relates to a microscope device wherein illumination rays having coherence are separated into two portions.

Claims

1. A microscope device comprising:

an illumination optical system for irradiating an object with illumination rays in a line-like form;

a detection optical system for receiving light rays generated by the illumination rays in the line-like form to thereby form an image on a detector; and

scanning means for scanning the illumination rays in the line-like form;

wherein information on an image on a flat plane, obtained by scanning the illumination rays in the line-like form by use of the scanning means, is acquired on the basis of a signal from the detector,

wherein a primary axis of an objective lens of the illumination optical system, and a primary axis of an objective lens of the detection optical system intersect each other at a given angle, and

wherein the detector detects intensity distribution on a relevant line of the light rays generated by the illumination rays in the line-like form.

2. The microscope device according to claim 1, wherein the light rays generated by the illumination rays in the line-like form are fluorescent rays from the object.

3. The microscope device according to claim 1, wherein the light rays generated by the illumination rays in the line-like form are reflected, or scattered light rays from the object.

4. The microscope device according to claim 1, wherein the given angle is 90 degrees.

5. The microscope device according to claim 1, wherein given angle is in a range of 30 to 180 degrees.

6. The microscope device according to claim 1, wherein the object is irradiated with a near infrared laser beam in the illumination optical system.

7. The microscope device according to claim 1, wherein the object is irradiated with the illumination rays in the line-like form by causing parallel rays to fall on a cylindrical lens in the illumination optical system.

8. The microscope device according to claim 7, wherein the illumination rays in the line-like form are present on a focal plane of the detection optical system.

9. The microscope device according to claim 1, wherein the object is irradiated with the illumination rays in the line-like form by forming an image of a slit on the object in the illumination optical system.

10. The microscope device according to claim 9, wherein an intersection line between a focal plane of the illumination optical system and a focal plane of the detection optical system is irradiated with the illumination rays in the line-like form.

11. The microscope device according to claim 1, wherein the scanning means scans illumination rays in the line-like form in a direction perpendicular to the line.

12. The microscope device according to claim 1, wherein the scanning means causes the whole or a part of both the illumination optical system, and the detection optical system to move, thereby scanning the illumination rays in the line-like form.

13. The microscope device according to claim 1, wherein a slit is disposed on an image-forming plane of the detection optical system.

14. The microscope device according to claim 1, wherein the detector is a line sensor.

15. The microscope device according to claim 1, wherein the detector is a two-dimensional sensor, and the two-dimensional sensor is moved in conjunction with light rays for detection in such a way as to be in sync with scanning by the scanning means.

16. A microscope device wherein an objective lens of an illumination optical system for irradiating an object with illumination rays, and an objective lens of a detection optical system for detecting feedback light rays based on the illumination rays are at respective positions where respective primary axes of the objective lenses have undergone parallel translation against each other, the objective lenses being disposed such that respective focal planes thereof coincide with each other,

wherein a convergence point of the illumination optical system coincides with a detection point to be detected by the detection optical system while the respective focal planes are scanned according to the convergence point, and the detection point with the convergence point kept in coincidence with the detection point.

17. The microscope device according to claim 16, wherein an optical axis of the illumination optical system and an optical axis of the detection optical system intersect each other at an angle in a range of 30 to 150 degrees on the focal plane.

18. The microscope device according to claim 16, further comprising means for suppressing detection of light rays of the feedback light rays from entering the illumination optical system.

19. The microscope device according to claim 16, wherein the illumination optical system does not share an optical path with the detection optical system.

20. The microscope device according to claim 16, wherein the illumination optical system shares a portion of an optical path thereof with the detection optical system, the feedback light rays are fluorescent rays, and a filter or mirror having wavelength characteristics is used as means for suppressing detection of light rays of the fluorescent rays from entering the illumination optical system.

21. The microscope device according to claim 16, wherein the illumination optical system shares a part of an optical path thereof with the detection optical system, the feedback light rays are reflected or scattered light rays, and an optical component having polarization characteristics is used as means for suppressing detection of light rays of the reflected or scattered light rays from entering the illumination optical system.

22. The microscope device according to claim 16, wherein a variable mirror is used as means for scanning respective focal planes according to the convergence point, and the detection point.

23. The microscope device according to claim 16, wherein a mask pattern member with a predetermined pattern formed thereon is used as means for scanning respective focal planes according to the convergence point, and the detection point.

24. The microscope device according to claim 23, wherein a pinhole pattern is formed on the mask pattern member, and scanning is executed by rotation of the mask pattern member.

25. The microscope device according to claim 16, wherein a set of the convergence points of the illumination optical system is in the form of a line, and a set of the detection points to be detected by the detection optical system is in the form of a line, coinciding with the set of the convergence points.

26. The microscope device according to claim 16, wherein the illumination rays are a near infrared laser beam.

27. A microscope device wherein a specimen is irradiated with illumination rays via an objective lens to thereby form a focal point of the illumination rays on the specimen while acquiring feedback light rays from the focal point via the objective lens to be detected by a detector,

wherein an optical path of the illumination rays, from the objective lens to the focal point, is separated from an optical path of light rays of the feedback light rays, detected by the detector, from the focal point to the objective lens, throughout the respective optical paths.

28. The microscope device according to claim 27, wherein the feedback light rays are fluorescent rays.

29. The microscope device according to claim 27, wherein the feedback light rays are reflected or scattered light rays.

30. The microscope device according to claim 27, wherein the focal point of the illumination rays is scanned on a focal plane of the objective lens, and the feedback light rays from the respective focal points as scanned are detected by the detector.

31. The microscope device according to claim 30, wherein the focal point of the illumination rays is scanned by driving a mirror in the optical path of the illumination rays.

32. The microscope device according to claim 30, wherein the focal point of the illumination rays is scanned by driving a mask pattern member in the optical path of the illumination rays.

33. The microscope device according to claim 27, wherein a region at a position of a pupil of the objective lens, passed by the illumination rays reaching the focal point from the objective lens, is separated from a region at the position of the pupil of the objective lens, passed by the light rays of the feedback light rays, detected by the detector.

34. The microscope device according to claim 33, wherein a region passed by the illumination rays and a region passed by the feedback light rays are present in respective segments radially separated by at least one length of a straight line or a curve, crossing the position of the pupil of the objective lens, at the position of the pupil.

35. The microscope device according to claim 34, wherein a region passed by the illumination rays and a region passed by the feedback light rays are present in respective segments radially separated by at least two lengths of straight lines, or curves, intersecting each other, and crossing the position of the pupil of the objective lens, at the position of the pupil.

36. The microscope device according to claim 33, wherein a region passed by the illumination rays and a region passed by the feedback light rays are present in respective segments radially separated by at least one length of a straight line or a curve, crossing the position of the pupil of the objective lens, at the position of the pupil.

37. The microscope device according to claim 36, wherein a region passed by the illumination rays and a region passed by the feedback light rays are present in respective segments separated between inside and outside by at least one closed length of straight line or a curve, present inside the position of the pupil of the objective lens, at the position of the pupil.

38. The microscope device according to claim 27, further comprising optical path limiting means for separating the optical path of the feedback light rays from the optical path of the illumination rays.

39. The microscope device according to claim 38, wherein the feedback light rays are fluorescent rays, and a filter or mirror having wavelength characteristics is used as the optical path limiting means to thereby limit an optical path of the fluorescent rays to be detected by the detector.

40. The microscope device according to claim 38, wherein a filter or mirror having wavelength characteristics is used as the optical path limiting means to thereby limit an optical path of the illumination ray falling on the objective lens.

41. The microscope device according to claim 38, wherein the feedback light rays are reflected or scattered light rays, and a filter or a mirror, having polarization characteristics is used as the optical path limiting means to thereby limit an optical path of the feedback light rays detected by the detector.

42. The microscope device according to claim 38, wherein a portion of the optical path of the illumination rays or the optical path of the feedback light rays is limited by a light-blocking mask serving as the optical path limiting means.

43. The microscope device according to claim 38, wherein the optical path limiting means is provided in close proximity to a position of a pupil of the objective lens.

44. The microscope device according to claim 38, wherein the optical path limiting means is provided in close proximity to a spot where the position of the pupil of the objective lens is relayed.

45. The microscope device according to claim 38, wherein the optical path limiting means is provided in a potion of an optical path, where the illumination rays, or the feedback light rays are in the form of parallel rays.

46. The microscope device according to claim 27, wherein the optical path of the feedback light rays is made up of optical components independent from those making up the optical path of the illumination rays.

47. The microscope device according to claim 27, wherein a set of the focal points of the illumination rays is in the form of a line, and a set of the detection points to be detected by the detector is in the form of a line, coinciding with the set of the focal points.

48. The microscope device according to claim 27, wherein the illumination rays are a near infrared laser beam.

49. A microscope device wherein a specimen is irradiated with illumination rays to thereby detect feedback light rays from the specimen, based on the illumination rays, comprising:

modulation means for separating the illumination rays having coherence into at least two portions to thereby apply modulation to at least one portion of the illumination rays as separated;

objective lenses for guiding the two portions of the illumination rays as separated such that respective optical paths overlap each other on the specimen; and

detection means for detecting light rays generated by interference light occurring in a region where the respective optical paths overlap each other as feedback light rays.

50. The microscope device according to claim 49, wherein the objective lenses cause the two portions of the illumination rays as separated to form one and the same focal point on the specimen, and the detection means acquires the light rays generated by the interference light occurring at the focal point as the feedback light rays via the objective lens for detection.

51. The microscope device according to claim 49, wherein optical paths of the two portions of the illumination rays as separated between the respective objective lenses and the focal point are separated from each other so as not to overlap each other.

52. The microscope device according to claim 49, wherein phase modulation, or frequency modulation, varying at a given frequency, is applied to one of the two portions of the illumination rays, intensity modulation varying at the frequency is induced by the interference light occurring at the focal point on the specimen, and a signal of the light rays generated by the interference light is acquired to thereby extract a frequency component of the modulation.

53. The microscope device according to claim 49, wherein modulations at given frequencies differing from each other are applied to at least two portions of the illumination rays, and intensity modulation varying at a sum of, or a difference between at least two frequencies is induced by the interference light occurring at the focal point on the specimen.

54. The microscope device according to claim 53, wherein the modulation is any of phase modulation, intensity modulation, and frequency modulation, a signal of the light rays generated by the interference light is acquired, and a frequency component corresponding to the sum of, or the difference between the at least two frequencies is extracted.

55. The microscope device according to claim 49, wherein the feedback light rays are fluorescent rays, and the detection means detects the fluorescent rays generated by the interference light.

56. The microscope device according to claim 49, wherein at least two portions of the illumination rays fall on the objective lenses, respectively, as parallel rays, each being light rays smaller in size than the diameter of a pupil of the objective lens at a pupil position of the objective lens where no overlapping occurs.

57. The microscope device according to claim 49, wherein a region where the illumination rays overlap each other are scanned, and the detection means detects feedback light rays from the respective focal points as scanned.