METHOD OF MAKING INORGANIC OR INORGANIC/ORGANIC HYBRID FILMS
First Claim
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1. A method for forming an inorganic or hybrid organic/inorganic layer on a substrate, which method comprises:
- vaporizing a metal alkoxide;
condensing the metal alkoxide to form a layer atop the substrate; and
contacting the condensed metal alkoxide layer with water to cure the layer.
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Abstract
A method for forming an inorganic or hybrid organic/inorganic layer on a substrate, which method comprises vaporizing a metal alkoxide, condensing the metal alkoxide to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure the layer is disclosed.
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Citations
39 Claims
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1. A method for forming an inorganic or hybrid organic/inorganic layer on a substrate, which method comprises:
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vaporizing a metal alkoxide; condensing the metal alkoxide to form a layer atop the substrate; and contacting the condensed metal alkoxide layer with water to cure the layer. - View Dependent Claims (3, 7, 8, 9, 10, 11, 12, 13, 25, 26, 27, 28, 30, 31, 32)
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2. (canceled)
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4-6. -6. (canceled)
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14-15. -15. (canceled)
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16. A method for forming a hybrid organic/inorganic layer on a substrate, which method comprises:
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vaporizing a metal alkoxide; vaporizing an organic compound; condensing the vaporized alkoxide and vaporized organic compound to form a layer atop the substrate; and curing the layer. - View Dependent Claims (18, 19, 21, 22, 23, 24, 33, 34, 35, 36, 37, 38)
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17. (canceled)
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20. (canceled)
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29. (canceled)
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39-40. -40. (canceled)
Specification