METHOD FOR TUNING A WORK FUNCTION OF HIGH-K METAL GATE DEVICES

• US 20100068877A1
• Filed: 06/22/2009
• Published: 03/18/2010
• Est. Priority Date: 09/12/2008
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Thei, Kong-Beng, Chuang, Harry, Chung, Sheng-Chen, Yeh, Chiung-Han
• Granted Patent: US 7,927,943 B2
• Time in Patent Office: Days
• US Class Current: 438/592
• CPC Class Codes: H01L 21/28088 the final conductor layer next to the insulator being a composite, e.g. TiN
• CPC Class Codes: H01L 21/823842 gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
• CPC Class Codes: H01L 29/517 the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate H01L29/518 takes precedence
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate

Abstract

The present disclosure provides a method of fabricating a semiconductor device that includes providing a semiconductor substrate, forming first and second transistors in the substrate, the first transistor having a first gate structure that includes a first dummy gate, the second transistor having a second gate structure that includes a second dummy gate, removing the first and second dummy gates thereby forming a first trench and a second trench, respectively, forming a first metal layer to partially fill in the first and second trenches, removing the first metal layer within the first trench, forming a second metal layer to partially fill in the first and second trenches, forming a third metal layer to partially fill in the first and second trenches, reflowing the second metal layer and the third metal layer, and forming a fourth metal layer to fill in the remainder of the first and second trenches.

Claims

1. A method of fabricating a semiconductor device comprising:

providing a semiconductor substrate;

forming a first transistor and a second transistor in the substrate, the first transistor having a first gate structure that includes a first dummy gate, the second transistor having a second gate structure that includes a second dummy gate;

removing the first dummy gate and the second dummy gate thereby forming a first trench and a second trench, respectively;

forming a first metal layer to partially fill the first and second trenches;

removing the first metal layer within the first trench;

forming a second metal layer to partially fill the first and second trenches;

forming a third metal layer to partially fill the first and second trenches;

performing a thermal process to reflow the second metal layer and the third metal layer; and

forming a fourth metal layer to fill a remainder of the first and second trenches.

2. The method of claim 1, wherein the first and second dummy gates each includes polysilicon.

3. The method of claim 1, wherein the second metal layer includes Ti.

4. The method of claim 3, wherein the third metal layer includes Al.

5. The method of claim 4, wherein performing the thermal process includes performing the thermal process at a temperature ranging from 200 to about 500 degree C.

6. The method of claim 1, further comprising performing a chemical mechanical polishing (CMP) after forming the fourth metal layer to planarize the first and second gate structures.

7. The method of claim 6, further comprising performing another CMP process prior to forming the fourth metal layer.

8. The method of claim 1, wherein the barrier layer includes TiN and the fourth metal layer includes Al.

9. The method of claim 8, wherein the first metal layer includes a multi-metal layer of TiN and WN.

10. The method of claim 1, wherein the first transistor is an NMOS device and the second transistor is a PMOS device.

11. A method of fabricating a semiconductor device comprising:

providing a semiconductor substrate;

forming a first transistor and a second transistor in the substrate, the first transistor including a first gate structure, the second transistor including a second gate structure, the first gate structure and the second gate structure each including a high-k dielectric layer formed over the substrate, a barrier layer formed over the high-k dielectric layer, and a dummy poly layer formed over the barrier layer;

removing the dummy poly layer from the first and second gate structures thereby forming first and second trenches, respectively;

forming a P-type work function metal (P-metal) to partially fill in the first and second trenches;

removing the P-metal within the first trench;

forming a layer of Ti to partially fill in the first and second trenches;

forming a layer of Al to partially fill in the first and second trenches;

reflowing the Al layer and Ti layer to form a layer of TiAl; and

forming a fill metal layer to fill in the remainder of the first and second trenches.

12. The method of claim 11, wherein the Ti layer is formed by physical vapor deposition (PVD).

13. The method of claim 12, wherein the Al layer is formed by chemical vapor deposition (CVD).

14. The method of claim 11, wherein reflowing the Al layer and Ti layer includes performing a thermal process at a temperature ranging from about 200 to about 500 degree C.

15. The method of claim 11, wherein the Ti layer includes a thickness of about 30 angstrom and the Al layer includes a thickness of about 70 angstrom.

16. A method of fabricating a semiconductor device comprising:

providing a semiconductor substrate;

forming a first transistor and a second transistor in the substrate, the first transistor including a first gate structure, the second transistor including a second gate structure, the first and second gate structures each including a high-k dielectric layer formed over the substrate, a barrier layer formed over the high-k dielectric layer, and a dummy poly layer formed over the barrier layer;

removing the dummy poly layer from the first and second gate structures thereby forming first and second trenches, respectively;

forming a P-type work function metal (P-metal) to partially fill the first and second trenches;

removing the P-metal within the first trench;

forming a layer of Ti to partially fill the first and second trenches;

forming a layer of Al to partially fill in the first and second trenches;

reflowing the Al layer and Ti layer to form a layer of TiAl;

performing a chemical mechanical polishing (CMP) to remove the various metal layers disposed outside the first and second trenches; and

forming a fill metal layer to fill a remainder of the first and second trenches.

17. The method of claim 16, further comprising performing another CMP immediately after forming the fill metal layer to remove the fill metal layer disposed outside the first and second trenches.

18. The method of claim 16, wherein the fill metal layer includes one of Al, W, and Cu.

19. The method of claim 16, wherein the Ti layer includes a thickness of about 30 angstrom, and wherein the Al layer includes a thickness of about 70 angstrom.

20. The method of claim 19, wherein the TI layer is formed by physical vapor deposition (PVD), and wherein the Al layer is formed by chemical vapor deposition (CVD).