METHOD OF FORMING BARRIER FILM

• US 20100068891A1
• Filed: 11/08/2007
• Published: 03/18/2010
• Est. Priority Date: 11/09/2006
• Status: Active Grant

• Current Assignee: Ulvac Incorporated
• Original Assignee: Ulvac Incorporated
• Inventors: Hatanaka, Masanobu, Ishikawa, Michio, Tsumagari, Kanako
• Granted Patent: US 8,084,368 B2
• Time in Patent Office: Days
• US Class Current: 438/758
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/38 Borides
• CPC Class Codes: C23C 16/4554 Plasma being used non-continuously in between ALD reactions C23C16/56 takes precedence
• CPC Class Codes: C23C 16/45555 applied in non-semiconductor technology
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01L 21/28562 Selective deposition
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric

Abstract

A barrier film made of a ZrB₂ film is formed by use of a coating apparatus provided with plasma generation means including a coaxial resonant cavity and a microwave supply circuit for exciting the coaxial resonant cavity, the coaxial resonant cavity including spaced apart conductors provided around the periphery of a nonmetallic pipe for reactive gas introduction, the coaxial resonant cavity having an inner height equal to an integer multiple of one-half of the exciting wavelength, the plasma generation means being constructed such that a gas injected from one end of the nonmetallic pipe is excited into a plasma state by a microwave when the gas is in a region of the nonmetallic pipe which is not covered with the conductors and such that the gas in the plasma state is discharged from the other end of the nonmetallic pipe.

Claims

1. A method of forming a barrier film using a coating apparatus provided with plasma generation means including

a coaxial resonant cavity and a microwave supply circuit, said coaxial resonant cavity including spaced apart conductors provided on an upper portion and a lower portion of the periphery of a nonmetallic pipe for reactive gas introduction, said coaxial resonant cavity having an inner height equal to an integer multiple of one-half of the exciting wavelength, said plasma generation means being constructed such that a gas injected from one end of said nonmetallic pipe is excited into a plasma state by a microwave when said gas is in a region of said nonmetallic pipe which is not provided with said conductors and such that said gas in said plasma state is discharged from the other end of said nonmetallic pipe, said method comprising:

placing an object to be coated within a vacuum chamber of said coating apparatus, said object to be coated having an insulating film with a hole and a trench formed therein; and

reacting a material gas composed of Zr(BH₄)₄ gas with a plasma gas over a surface of said object to be coated, using ALD, to form a barrier film made of a ZrB₂ film on said insulating film and on an inner surface of said hole and an inner surface of said trench, said plasma gas being obtained by converting a reactive gas composed of H₂ gas into a plasma state by said plasma generation means.

2. The method as claimed in claim 1, further comprising:

repeating an adsorption step and a modification step to form said barrier film made of said ZrB₂ film on said insulating film and on said inner surface of said hole and said inner surface of said trench,

wherein said adsorption step supplies said material gas and said reactive gas such that said material gas is adsorbed on said object to be coated having said insulating film with said hole and said trench formed therein; and

wherein said modification step shuts off said supply of said material gas, continuously supplies only said reactive gas, and converts said supplied reactive gas into a plasma state by said plasma generation means such that said reactive gas in said plasma state reacts with and modifies said material gas adsorbed on said object to be coated.

11. The method as claimed in claim 2, wherein when said barrier film is formed, the flow rate of said reactive gas in said adsorption step differs from the flow rate of said reactive gas in said modification step.

12. The method as claimed in claim 1, further comprising:

repeating an adsorption step and a modification step to form said barrier film made of said ZrB₂ film on said insulating film and on said inner surface of said hole and said inner surface of said trench,

wherein said adsorption step supplies said material gas and said reactive gas which has been converted into a plasma state by said plasma generation means, such that said material gas is adsorbed on said object to be coated having said insulating film with said hole and said trench formed therein; and

wherein said modification step shuts off only said supply of said material gas and continuously supplies said reactive gas which has been converted into said plasma state by said plasma generation means, such that said reactive gas in said plasma state reacts with and modifies said material gas adsorbed on said object to be coated.

13. The method as claimed in claim 12, wherein when said barrier film is formed, the flow rate of said reactive gas in said adsorption step differs from the flow rate of said reactive gas in said modification step.

14. The method as claimed in claim 1, wherein said barrier film is formed while said object to be coated is heated to a temperature of 50-300°

C., said object to be coated being a substrate.

15. The method as claimed in claim 1, wherein said barrier film is formed while a cooling gas is introduced into said coaxial resonant cavity to cool said region of said nonmetallic pipe which is not provided with said conductors.

16. The method as claimed in claim 1, wherein:

said nonmetallic pipe has double sidewalls; and

said barrier film is formed while a cooling fluid is circulated through the space between said sidewalls to cool said nonmetallic pipe.

18. The method as claimed in claim 12, further comprising:

repeating an adsorption step and a modification step to form said barrier film made of said ZrBN film on said insulating film and on said inner surface of said hole and said inner surface of said trench,

wherein said adsorption step supplies said material gas and said reactive gas such that said material is adsorbed on said object to be coated having said insulating film with said hole and said trench formed therein; and

wherein said modification step shuts off said supply of said material gas, continuously supplies only said reactive gas, and converts said supplied reactive gas into a plasma state by said plasma generation means such that said reactive gas in said plasma state reacts with and modifies said material gas adsorbed on said object to be coated.

19. The method as claimed in claim 18, wherein when said barrier film is formed, the flow rate of said reactive gas in said adsorption step differs from the flow rate of said reactive gas in said modification step.

20. The method as claimed in claim 12, further comprising:

repeating an adsorption step and a modification step to form said barrier film made of said ZrBN film on said insulating film and on said inner surface of said hole and said inner surface of said trench,

wherein said adsorption step supplies said material gas and said reactive gas which has been converted into a plasma state by said plasma generation means, such that said material gas is adsorbed on said object to be coated having said insulating film with said hole and said trench formed therein; and

wherein said modification step shuts off only said supply of said material gas and continuously supplies said reactive gas which has been converted into said plasma state by said plasma generation means, such that said reactive gas in said plasma state reacts with and modifies said material gas adsorbed on said object to be coated.

21. The method as claimed in claim 20, wherein when said barrier film is formed, the flow rate of said reactive gas in said adsorption step differs from the flow rate of said reactive gas in said modification step.

3-10. -10. (canceled)

17. A method of forming a barrier film using a coating apparatus provided with plasma generation means including a coaxial resonant cavity and a microwave supply circuit, said coaxial resonant cavity including spaced apart conductors provided on an upper portion and a lower portion of the periphery of a nonmetallic pipe for reactive gas introduction, said coaxial resonant cavity having an inner height equal to an integer multiple of one-half of the exciting wavelength, said plasma generation means being constructed such that a gas injected from one end of said nonmetallic pipe is excited into a plasma state by a microwave when said gas is in a region of said nonmetallic pipe which is not provided with said conductors and such that said gas in said plasma state is discharged from the other end of said nonmetallic pipe, said method comprising:

placing an object to be coated within a vacuum chamber of said coating apparatus, said object to be coated having an insulating film with a hole and a trench formed therein; and

reacting a material gas composed of Zr(BH₄)₄ gas with a plasma gas over a surface of said object to be coated, using ALD, to form a barrier film made of a ZrBN film on said insulating film and on an inner surface of said hole and an inner surface of said trench, said plasma gas being obtained by converting a reactive gas composed of H₂ gas mixed with at least one of N₂ and NH₃ into a plasma state by said plasma generation means.

22. The method as claimed in claim 17, wherein said barrier film is formed while said object to be coated is heated to a temperature of 50-300°

C., said object to be coated being a substrate.

23. The method as claimed in claim 17, wherein said barrier film is formed while a cooling gas is introduced into said coaxial resonant cavity to cool said region of said nonmetallic pipe which is not provided with said conductors.

24. The method as claimed in claim 17, wherein:

said nonmetallic pipe has double sidewalls; and

said barrier film is formed while a cooling fluid is circulated through the space between said sidewalls to cool said nonmetallic pipe.