×

INTEGRATED MULTIAXIS MOTION SENSOR

  • US 20100071467A1
  • Filed: 09/24/2008
  • Published: 03/25/2010
  • Est. Priority Date: 09/24/2008
  • Status: Abandoned Application
First Claim
Patent Images

1. An inertial sensor assembly comprising:

  • a substrate parallel to the plane;

    at least one angular velocity sensor comprising a pair of proof masses that are oscillated in anti-phase fashion along an axis normal to the plane;

    said angular velocity sensor comprising a sensing frame responsive to the angular velocity of the substrate around the first axis parallel to the plane;

    said sensing frame moving in-plane in response to said angular velocity;

    a transducer for sensing motion of said sensing frame;

    at least one angular velocity sensor comprising a pair of proof masses that are oscillated in anti-phase fashion along an axis parallel to the plane;

    said angular velocity sensor comprising a sensing frame responsive to the angular velocity of the substrate around the axis normal to the plane;

    said sensing frame moving in-plane in response to said angular velocity;

    a transducer for sensing motion of said sensing frame;

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×