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INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE

  • US 20100071468A1
  • Filed: 02/19/2008
  • Published: 03/25/2010
  • Est. Priority Date: 02/20/2007
  • Status: Active Grant
First Claim
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1. An inertia force sensor comprising a detection element having an acceleration detection section, the detection element has a fixation section having a weight section via a connecting section, an opposed substrate opposed to the weight section, and opposed electrodes formed at the respective opposed face of the weight section and the opposed substrate, the acceleration detection section is structured so that a status change caused by movability of the weight section due to distortion of the connecting section is detected by the opposed electrode to thereby detect an inertia force,wherein:

  • the connecting section has a thickness thinner than a thickness of the weight section.

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