INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE
First Claim
1. An inertia force sensor comprising a detection element having an acceleration detection section, the detection element has a fixation section having a weight section via a connecting section, an opposed substrate opposed to the weight section, and opposed electrodes formed at the respective opposed face of the weight section and the opposed substrate, the acceleration detection section is structured so that a status change caused by movability of the weight section due to distortion of the connecting section is detected by the opposed electrode to thereby detect an inertia force,wherein:
- the connecting section has a thickness thinner than a thickness of the weight section.
1 Assignment
0 Petitions
Accused Products
Abstract
An inertia force sensor includes a detection element having an acceleration detection section (1). This detection element (1) has: two orthogonal arms obtained by connecting first arms (8) to second arms (10) so as to be orthogonal to each other, a support section (12) for supporting one ends of the two first arm (8), a fixation section (4) connected to the other ends of the two first arms (8), and weight sections (2) fixed to tip ends of the second arms (10). The first arm (8) has a thickness thinner than thicknesses of the second arm (10) and weight section (2) to thereby provide an increased detection sensitivity.
-
Citations
14 Claims
-
1. An inertia force sensor comprising a detection element having an acceleration detection section, the detection element has a fixation section having a weight section via a connecting section, an opposed substrate opposed to the weight section, and opposed electrodes formed at the respective opposed face of the weight section and the opposed substrate, the acceleration detection section is structured so that a status change caused by movability of the weight section due to distortion of the connecting section is detected by the opposed electrode to thereby detect an inertia force,
wherein: the connecting section has a thickness thinner than a thickness of the weight section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
9. An inertia force sensor including a detection element having an acceleration detection section and an angular velocity detection section, the detection element has two orthogonal arm sections obtained by connecting first arm sections to second arm sections so that the first arm sections are orthogonal to the second arm sections, a support section supporting the two first arm sections, weight sections connected to tip ends of the second arm sections, fixation sections connected to the first arm sections, an opposed substrate opposed to the weight sections, opposed electrodes formed at the respective opposed face of the weight sections and the opposed substrate, a driving electrode formed in the second arm section for outputting a driving signal for vibrating the second arm section, and a sensing electrode formed in the second arm section for sensing distortion of the second arm section to output a sensing signal, the inertia force detection section is structured so that a status change caused by movability of the weight sections due to distortion of the first arm is detected by the opposed electrodes to detect an inertia force, and 2the angular velocity detection section is structured so that a status change due to a Coriolis force of the weight section is detected by the sensing electrode to thereby detect an angular velocity,
wherein: the first arm section has a thickness thinner than a thickness of the second arm section. - View Dependent Claims (10, 11, 12, 13, 14)
Specification