DISPLAY DEVICE AND MANUFACTURING METHOD OF THE SAME

• US 20100072469A1
• Filed: 09/10/2009
• Published: 03/25/2010
• Est. Priority Date: 09/19/2008
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: AKIMOTO, Kengo, YAMAZAKI, Shunpei, UOCHI, Hideki, CHIBA, Yoko, KOMORI, Shigeki, WADA, Rihito
• Granted Patent: US 8,427,595 B2
• Time in Patent Office: Days
• US Class Current: 257/43
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

To provide a structure suitable for a common connection portion provided in a display panel. A common connection portion provided in an outer region of a pixel portion has a stacked structure of an insulating layer formed using the same layer as a gate insulating layer, an oxide semiconductor layer formed using the same layer as a second oxide semiconductor layer, and a conductive layer (also referred to as a common potential line) formed using the same layer as the conductive layer, in which the conductive layer (also referred to as the common potential line) is connected to a common electrode through an opening in an interlayer insulating layer provided over the first oxide semiconductor layer and an electrode opposite to a pixel electrode is electrically connected to the common electrode through conductive particles.

Claims

1. A display device comprising:

a first substrate having a pixel portion and a common connection portion;

a second substrate having a first conductive layer; and

a conductive particle interposed between the first substrate and the second substrate,

wherein the pixel portion comprises;

a gate electrode over the first substrate;

a first insulating layer over the gate electrode;

a first oxide semiconductor layer and a second oxide semiconductor layer over the first insulating layer;

a second conductive layer over the first oxide semiconductor layer;

a third conductive layer over the second oxide semiconductor layer;

a third oxide semiconductor layer over the second and third conductive layers and the first insulating layer;

a second insulating layer having a first contact hole formed over the third conductive layer, the second insulating layer over the second and third conductive layers and the third oxide semiconductor layer; and

a fourth conductive layer over the second insulating layer and electrically connected to the third conductive layer through the first contact hole,

wherein the common connection portion comprises;

a third insulating layer over the first substrate, the third insulating layer formed using the same material as the first insulating layer;

a fourth oxide semiconductor layer over the third insulating layer, the fourth oxide semiconductor layer formed using the same material as the first and second oxide semiconductor layers;

a fifth conductive layer over the fourth oxide semiconductor layer, the fifth conductive layer formed using the same material as the second and third conductive layers;

a fourth insulating layer having a second contact hole formed over the fifth conductive layer, the fourth insulating layer formed using the same material as the second insulating layer; and

a sixth conductive layer over the fourth insulating layer and electrically connected to the fifth conductive layer through the second contact hole, the sixth conductive layer formed using the same material as the fourth conductive layer,

wherein the sixth conductive layer in the common connection portion is electrically connected to the first conductive layer through the conductive particle.

2. The display device according to claim 1, wherein an oxygen concentration of the third oxide semiconductor layer is higher than an oxygen concentration of the first and second oxide semiconductor layers.

3. The display device according to claim 1, wherein an electric conductivity of the third oxide semiconductor layer is lower than an electric conductivity of the first and second oxide semiconductor layers.

4. The display device according to claim 1, wherein the third oxide semiconductor layer is of an oxygen-excess type and the first and second oxide semiconductor layers are of an oxygen-deficiency type.

5. The display device according to claim 1, wherein the first oxide semiconductor layer, the second oxide semiconductor layer and the third oxide semiconductor layer include indium, gallium, and zinc.

6. A display device comprising:

a first substrate having a pixel portion and a common connection portion;

a second substrate having a first conductive layer; and

a conductive particle interposed between the first substrate and the second substrate,

wherein the pixel portion comprises;

a gate electrode over the first substrate;

a first insulating layer over the gate electrode;

a first oxide semiconductor layer and a second oxide semiconductor layer over the first insulating layer;

a second conductive layer over the first oxide semiconductor layer;

a third conductive layer over the second oxide semiconductor layer;

a third oxide semiconductor layer over the second and third conductive layers and the first insulating layer;

a second insulating layer having a first contact hole formed over the third conductive layer, the second insulating layer over the second and third conductive layers and the third oxide semiconductor layer; and

a fourth conductive layer over the second insulating layer and electrically connected to the third conductive layer through the first contact hole;

wherein the common connection portion comprises;

a fifth conductive layer over the first substrate, the fifth conductive layer formed using the same material as the gate electrode;

a third insulating layer over the fifth conductive layer, the third insulating layer formed using the same material as the first insulating layer;

a fourth insulating layer over the third insulating layer, the fourth insulating layer formed using the same material as the second insulating layer, the third and fourth insulating layers having a second contact hole formed over the fifth conductive layer; and

a sixth conductive layer over the fourth insulating layer and electrically connected to the fifth conductive layer through the second contact hole, the sixth conductive layer formed using the same material as the fourth conductive layer,

wherein the sixth conductive layer in the common connection portion is electrically connected to the first conductive layer through the conductive particle.

7. The display device according to claim 6, wherein an oxygen concentration of the third oxide semiconductor layer is higher than an oxygen concentration of the first and second oxide semiconductor layers.

8. The display device according to claim 6, wherein an electric conductivity of the third oxide semiconductor layer is lower than an electric conductivity of the first and second oxide semiconductor layers.

9. The display device according to claim 6, wherein the third oxide semiconductor layer is of an oxygen-excess type and the first and second oxide semiconductor layers are of an oxygen-deficiency type.

10. The display device according to claim 6, wherein the first oxide semiconductor layer, the second oxide semiconductor layer and the third oxide semiconductor layer include indium, gallium, and zinc.

11. A display device comprising:

a first substrate having a pixel portion and a common connection portion;

a second substrate having a first conductive layer; and

a conductive particle interposed between the first substrate and the second substrate,

wherein the pixel portion comprises;

a gate electrode over the first substrate;

a first insulating layer over the gate electrode;

a first oxide semiconductor layer and a second oxide semiconductor layer over the first insulating layer;

a second conductive layer over the first oxide semiconductor layer;

a third conductive layer over the second oxide semiconductor layer;

a third oxide semiconductor layer over the second and third conductive layers and the first insulating layer;

a second insulating layer having a first contact hole formed over the third conductive layer, the second insulating layer over the second and third conductive layers and the third oxide semiconductor layer; and

a fourth conductive layer over the second insulating layer and electrically connected to the third conductive layer through the first contact hole,

wherein the common connection portion comprises;

a fifth conductive layer over the first substrate, the fifth conductive layer formed using the same material as the gate electrode;

a third insulating layer over the fifth conductive layer, the third insulating layer formed using the same material as the first insulating layer;

a fourth oxide semiconductor layer over the third insulating layer, the fourth oxide semiconductor layer formed using the same material as the first and second oxide semiconductor layers;

a sixth conductive layer over the fourth oxide semiconductor layer, the sixth conductive layer formed using the same material as the second and third conductive layers;

a fourth insulating layer having a second contact hole formed over the sixth conductive layer, the fourth insulating layer formed using the same material as the second insulating layer; and

a seventh conductive layer over the fourth insulating layer and electrically connected to the sixth conductive layer through the second contact hole, the seventh conductive layer formed using the same material as the fourth conductive layer,

wherein the seventh conductive layer in the common connection portion is electrically connected to the first conductive layer through the conductive particle.

12. The display device according to claim 11, wherein an oxygen concentration of the third oxide semiconductor layer is higher than an oxygen concentration of the first and second oxide semiconductor layers.

13. The display device according to claim 11, wherein an electric conductivity of the third oxide semiconductor layer is lower than an electric conductivity of the first and second oxide semiconductor layers.

14. The display device according to claim 11, wherein the third oxide semiconductor layer is of an oxygen-excess type and the first and second oxide semiconductor layers are of an oxygen-deficiency type.

15. The display device according to claim 11, wherein the first oxide semiconductor layer, the second oxide semiconductor layer and the third oxide semiconductor layer include indium, gallium, and zinc.