Inertial sensor with dual cavity package and method of fabrication
First Claim
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1. An inertial sensor, comprising:
- a body having first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
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Abstract
Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
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Citations
21 Claims
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1. An inertial sensor, comprising:
- a body having first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An inertial sensor, comprising:
- a body having first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, test points which are disposed in the second cavity and connected electrically to the sensing element for testing the sensing element when the first cavity is closed, leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry, and interface pads mounted on the outside of the body for making additional connections with the circuitry.
- View Dependent Claims (15)
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16. A method of fabricating an inertial sensor, comprising the steps of:
- forming a body with first and second cavities on opposite sides thereof, mounting a sensing element in the first cavity, mounting electronic circuitry in the second cavity, electrically interconnecting the sensing element and the electronic circuitry, and attaching external leads to the body for mounting the sensor and making connections with the circuitry.
- View Dependent Claims (17, 18, 19, 20, 21)
Specification