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Inertial sensor with dual cavity package and method of fabrication

  • US 20100072862A1
  • Filed: 09/23/2008
  • Published: 03/25/2010
  • Est. Priority Date: 09/23/2008
  • Status: Active Grant
First Claim
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1. An inertial sensor, comprising:

  • a body having first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.

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