Tune Range Limiter

• US 20100073104A1
• Filed: 09/24/2008
• Published: 03/25/2010
• Est. Priority Date: 09/24/2008
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Harnett, Sean O., Cotter, Daniel H.
• Granted Patent: US 7,863,996 B2
• Time in Patent Office: Days
• US Class Current: 333/17.300
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance

Abstract

An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.

Claims

1. An impedance matching network, comprising:

a first input port that receives radio frequency (RF) power and includes an input impedance;

an output port that provides the RF power and includes an output impedance; and

a variable capacitance module that varies the output impedance and comprises

a first variable capacitor;

a second variable capacitor;

a first motor; and

a second motor that adjusts a capacitance of the second variable capacitor, wherein a relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.

2. The impedance matching network of claim 1 wherein the first and second motors are stepper motors.

3. The impedance matching network of claim 1 further comprising a control module that determines the desired value based on a portion of the RF power that is reflected from a load that is driven by the output port.

4. The impedance matching network of claim 3 wherein the control module drives the second motor.

5. The impedance matching network of claim 4 wherein the control module includes a lookup table that is stored in a memory and represents the relationship between the desired and actual values of the capacitance.

6. The impedance matching network of claim 1 wherein the relationship between the desired and actual values of the capacitance is described by a polynomial relationship.

7. The impedance matching network of claim 1 wherein the relationship between the desired and actual values of the capacitance is described by a piecewise linear relationship.

8. An impedance matching network, comprising:

a first input port that receives radio frequency (RF) power and includes an input impedance;

an output port that provides the RF power and includes an output impedance; and

a variable capacitance circuit that varies the output impedance and comprises

a first variable capacitor;

a second variable capacitor;

a first motor that includes an output shaft that rotates to a first position wherein the first position corresponds with a first capacitance of the first variable capacitor; and

a second motor that includes an output shaft that rotates to a second position wherein the second position corresponds with a second capacitance of the second variable capacitor and wherein a relationship between a desired value of the first capacitance and an actual value of the first capacitance is dependent on the second position.

9. The impedance matching network of claim 8 wherein a relationship between a desired value of the second capacitance and an actual value of the second capacitance is dependent on the first position.

10. The impedance matching network of claim 8 wherein the first and second motors are stepper motors.

11. The impedance matching network of claim 8 further comprising a control module that determines the desired value based on a portion of the RF power that is reflected from a load that is driven by the output port.

12. The impedance matching network of claim 11 wherein the control module determines the first and second positions.

13. The impedance matching network of claim 12 wherein the control module includes a lookup table that is stored in memory and represents the relationship between the desired and actual values of the capacitance.

14. The impedance matching network of claim 8 wherein the relationship between the desired and actual values of the first capacitance is described by a polynomial equation.

15. The impedance matching network of claim 8 wherein the relationship between the desired and actual values of the first capacitance is described by a piecewise linear equation.

16. A method of operating an impedance matching network, comprising:

receiving radio frequency (RF) power via an input that includes an input impedance;

providing the RF power at an output that includes an output impedance; and

adjusting first and second capacitances to vary the output impedance, wherein a relationship between a desired value of the second capacitance and an actual value of the second capacitance is dependent on the value of the first capacitance.

17. The method of claim 16 wherein adjusting first and second capacitances includes driving respective first and second motors to positions that determine the respective first and second capacitances.

18. The method of claim 16 further comprising determining the desired value based on a portion of the RF power that is reflected from a load that is driven by the output port.

19. The method of claim 16 further comprising storing a lookup table in a computer memory wherein the lookup table represents the relationship between the desired and actual values of the second capacitance.

20. The method of claim 16 wherein the relationship between the desired and actual values of the second capacitance is described by a polynomial relationship.

21. The method of claim 16 wherein the relationship between the desired and actual values of the capacitance is described by a piecewise linear relationship.