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DUAL THIN FILM PRECISION RESISTANCE TRIMMING

  • US 20100073122A1
  • Filed: 09/17/2009
  • Published: 03/25/2010
  • Est. Priority Date: 09/17/2008
  • Status: Active Grant
First Claim
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1. A trimmable resistance structure, comprising:

  • an integrated semiconductor circuit having components in a silicon substrate;

    a resistive structure composed of a material whose resistance is permanently changeable by application of heat thereto, the resistive structure being part of the integrated circuit;

    a dielectric disposed adjacent to the resistive structure;

    a heater disposed adjacent to the dielectric, the dielectric being disposed so as to separate the heater from the resistive structure; and

    a switch coupled between the heater and a voltage supply.

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