DUAL THIN FILM PRECISION RESISTANCE TRIMMING
First Claim
Patent Images
1. A trimmable resistance structure, comprising:
- an integrated semiconductor circuit having components in a silicon substrate;
a resistive structure composed of a material whose resistance is permanently changeable by application of heat thereto, the resistive structure being part of the integrated circuit;
a dielectric disposed adjacent to the resistive structure;
a heater disposed adjacent to the dielectric, the dielectric being disposed so as to separate the heater from the resistive structure; and
a switch coupled between the heater and a voltage supply.
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Accused Products
Abstract
A trimmable resistor for use in an integrated circuit is trimmed using a heater. The heater is selectively coupled to a voltage source. The application of voltage to the heater causes the heater temperature to increase and produce heat. The heat permeates through a thermal separator to the trimmable resistor. The resistance of the trimmable resistor is permanently increased or decreased when the temperature of the resistor is increased to a value within a particular range of temperatures.
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Citations
19 Claims
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1. A trimmable resistance structure, comprising:
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an integrated semiconductor circuit having components in a silicon substrate; a resistive structure composed of a material whose resistance is permanently changeable by application of heat thereto, the resistive structure being part of the integrated circuit; a dielectric disposed adjacent to the resistive structure; a heater disposed adjacent to the dielectric, the dielectric being disposed so as to separate the heater from the resistive structure; and a switch coupled between the heater and a voltage supply. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A resistor trimming method, comprising:
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applying a voltage to a heater through a switch; heating a resistive structure adjacent to the heater; permanently changing the resistance value of the resistive structure during the heating step; and removing the voltage from the heater. - View Dependent Claims (8, 9, 10, 11)
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12. A circuit, comprising:
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an amplifier; a trimmable thin film resistor electrically coupled to the amplifier; a thin film heater thermally coupled to the trimmable thin film resistor; a transistor electrically coupled to the thin film heater to selectively permit current to increase a temperature of the thin film heater; and a thin film thermal separator disposed between the trimmable thin film resistor and the thin film heater. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification