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DEFECT DETECTION USING TIME DELAY LOCK-IN THERMOGRAPHY (LIT) AND DARK FIELD LIT

  • US 20100073665A1
  • Filed: 02/05/2008
  • Published: 03/25/2010
  • Est. Priority Date: 02/05/2008
  • Status: Active Grant
First Claim
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1. A method of performing time delay lock-in thermography (LIT) on a sample, the method comprising:

  • moving a field of view (FOV) of an IR camera over the sample, the moving being at a constant velocity;

    providing a modulation to the sample throughout the moving;

    capturing IR images using the IR camera throughout the moving, wherein moving the FOV, providing the modulation, and capturing the IR images are synchronized; and

    filtering the IR images to generate a time delay LIT image, thereby providing defect identification.wherein filtering includes performing two equations;

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