PIEZOELECTRIC ACTUATOR, HEAD SLIDER AND MAGNETIC DISK DRIVE
First Claim
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1. A piezoelectric actuator comprising:
- a piezoelectric body;
a first and a second electrode for applying an electric field to the piezoelectric body in order to polarize the piezoelectric body in a first direction at an elevated temperature, at least one of the first and the second electrode including a material whose resistivity decreases with elevation of the temperature; and
a third and a fourth electrode for applying an electric field to the piezoelectric body in a second direction across the first direction of the polarization of the piezoelectric body in order to actuate the piezoelectric body.
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Abstract
A piezoelectric actuator includes a piezoelectric body; a first and a second electrode for applying an electric field to the piezoelectric body in order to polarize the piezoelectric body in a first direction at an elevated temperature, at least one of the first and the second electrode including a material whose resistivity decreases with elevation of the temperature; and a third and a fourth electrode for applying an electric field to the piezoelectric body in a second direction across the first direction of the polarization of the piezoelectric body in order to actuate the piezoelectric body.
19 Citations
18 Claims
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1. A piezoelectric actuator comprising:
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a piezoelectric body; a first and a second electrode for applying an electric field to the piezoelectric body in order to polarize the piezoelectric body in a first direction at an elevated temperature, at least one of the first and the second electrode including a material whose resistivity decreases with elevation of the temperature; and a third and a fourth electrode for applying an electric field to the piezoelectric body in a second direction across the first direction of the polarization of the piezoelectric body in order to actuate the piezoelectric body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A head slider comprising:
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a slider substrate; a piezoelectric actuator on the slider substrate, including; a piezoelectric body, a first and a second electrode, for applying an electric field to the piezoelectric body in order to polarize the piezoelectric body in a first direction at an elevated temperature, at least one of the first and the second electrode including a material whose resistivity decreases with elevation of the temperature, and a third and a fourth electrode, for applying an electric field to the piezoelectric body in a second direction acrossing the first direction of the polarization of the piezoelectric body in order to actuate the piezoelectric body; a magnetic head on the piezoelectric actuator; and a heater for heating the at least one of the first and the second electrode. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A magnetic disk drive comprising:
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a storage disk for storing information; and a head slider including; a slider substrate; a piezoelectric actuator on the slider substrate, including; a piezoelectric body, a first and a second electrode, for applying an electric field to the piezoelectric body in order to polarize the piezoelectric body in a first direction at an elevated temperature, at least one of the first and the second electrode including a material whose resistivity decreases with elevation of the temperature, and a third and a fourth electrode, for applying an electric field to the piezoelectric body in a second direction acrossing the first direction of the polarization of the piezoelectric body in order to actuate the piezoelectric body; a magnetic head on the piezoelectric actuator, for storing information on the storage disk; and a heater for heating the at least one of the first and the second electrode. - View Dependent Claims (16, 17, 18)
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Specification