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BURIED TRACES FOR SEALED ELECTROSTATIC MEMBRANE ACTUATORS OR SENSORS

  • US 20100077609A1
  • Filed: 09/29/2008
  • Published: 04/01/2010
  • Est. Priority Date: 09/29/2008
  • Status: Active Grant
First Claim
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1. A method of fabricating a micro-electromechanical device, the method comprising:

  • providing a first dielectric layer;

    depositing a buried conductor layer over the first dielectric layer;

    patterning the buried conductor layer to form a buried conductive trace, such that the buried conductive trace is electrically connected to an outside power source;

    depositing a second dielectric layer over the buried conductor layer;

    patterning the second dielectric layer to create one or more vias that extend up to the buried conductive trace;

    depositing a first conductor layer over the second dielectric layer;

    patterning the first conductor layer to form at least one conductive electrode electrically connected to the buried conductive trace through the one or more vias; and

    forming at least one conductive membrane comprising membrane anchors, the membrane anchors disposed over the second dielectric layer, such that the at least one conductive membrane is electrically isolated from the at least one conductive electrode and the buried conductive trace, wherein the at least one conductive electrode is electrically connected to a power source through the buried conductive trace.

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