RADIATION DETECTION SYSTEM USING SOLID-STATE DETECTOR DEVICES
First Claim
1. A neutron detection device, comprising:
- a semiconductor substrate includinga substrate region having a back surface; and
an active region having a front surface;
a back contact layer disposed on the back surface for providing a first voltage potential at the back surface;
a plurality of elongated tube cavities extending from a plurality of respective openings in the front surface and continuing into the active region and almost through, but not totally through, the active region, wherein a center to center distance between each elongated tube is between 5 and 20 microns;
a front contact layer disposed on the front surface for providing a second voltage potential at the front surface, wherein the active region exhibits an internal electric field causing free charges to separate and drift across the active region; and
neutron reactive material filling the plurality of elongated tube cavities.
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Accused Products
Abstract
A neutron detection device (100) includes a semiconductor substrate including a gallium arsenide substrate region (102) having a back surface, and a high purity gallium arsenide active region (104) having a front surface. A back contact layer (118) is disposed on the back surface for providing a first voltage potential at the back surface. Elongated tube cavities extend from respective openings in the front surface into the active region (104) and almost through, but not totally through, the active region. A front contact layer is disposed on the front surface for providing a second voltage potential at the front surface. Neutron reactive material, e.g., pulverized Boron-10 powder, fills the elongated tube cavities to a high packing density. Optionally, spherical holes are formed into the substrate. The spherical holes are filled with neutron reactive material to enhance the efficiency of the neutron detection device.
76 Citations
21 Claims
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1. A neutron detection device, comprising:
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a semiconductor substrate including a substrate region having a back surface; and an active region having a front surface; a back contact layer disposed on the back surface for providing a first voltage potential at the back surface; a plurality of elongated tube cavities extending from a plurality of respective openings in the front surface and continuing into the active region and almost through, but not totally through, the active region, wherein a center to center distance between each elongated tube is between 5 and 20 microns; a front contact layer disposed on the front surface for providing a second voltage potential at the front surface, wherein the active region exhibits an internal electric field causing free charges to separate and drift across the active region; and neutron reactive material filling the plurality of elongated tube cavities. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A neutron radiation sensor system comprising an array of neutron detection devices, each such neutron detection device comprising:
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a semiconductor substrate including a substrate region having a back surface; and an active region having a front surface, wherein the active region exhibits an internal electric field causing free charges to separate and drift across the active region; a back contact layer disposed on the back surface for providing a first voltage potential at the back surface; a plurality of elongated tube cavities extending from a plurality of respective openings in the front surface and continuing into the active region and almost through, but not totally through, the active region, wherein a center to center distance between each elongated tube is between 5 and 20 microns; a front contact layer disposed on the front surface for providing a second voltage potential at the front surface; and neutron reactive material filling the plurality of elongated tube cavities. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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16. An apparatus for detecting neutrons comprising:
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a semiconductor substrate having first and second opposed surfaces; a layered metal arrangement disposed on the first surface of the semiconductor substrate and forming a rectifying junction; a low resistivity contact layer disposed on the second opposed surface of said semiconductor substrate; a voltage source connected between said layered metal arrangement and said low resistivity contact layer for reverse-biasing said rectifying junction; one or more spherical holes into the semiconductor substrate, the one or more spherical holes being of one or more diameters respectively; a neutron responsive layer within the one or more spherical holes; and a thin composite layer comprised of a modifier and a neutron responsive layer disposed on both the low resistivity contact layer and the layered metal arrangement for slowing neutrons and responsive to energetic neutrons incident thereon for providing positive charged particles to the semiconductor substrate, where the thin composite layer being comprised of elemental, or any compound of, .sup.10 B, .sup.6 Li, .sup.6 LiF, U, or Gd. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification