DEVICE AND METHOD FOR MODIFYING ACTUATION VOLTAGE THRESHOLDS OF A DEFORMABLE MEMBRANE IN AN INTERFEROMETRIC MODULATOR

• US 20100079849A1
• Filed: 12/04/2009
• Published: 04/01/2010
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Floyd, Philip D.
• Granted Patent: US 7,830,589 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an interferometric modulator selectively creates constructive and/or destructive interference between light waves reflecting off the two surfaces. The spacing can be varied by applying a voltage to create electrostatic attraction between the two surfaces, which causes one or both surfaces to deform and move closer together. In the absence of such attraction, the surfaces are in a relaxed position, where they are farther apart from one another. A actuation voltage is needed to create sufficient electrostatic attraction to cause a surface to deform. The actuation voltage can be modified by implanting ions in a dielectric layer attached to one or both surfaces. Upon the application of a voltage, the ions create a baseline level of repulsion or attraction between the two surfaces, which thus require more or less voltage, respectively, to cause a surface to deform. The degree of ion implantation can be chosen to set the actuation voltage as desired, or the surfaces can be made to deform at a given voltage by appropriately selecting the degree of ion implantation.

Claims

1. A method for modulating electromagnetic radiation, comprising:

providing a plurality of micromechanical devices, each device comprising;

a conductor layer; and

a reflective layer parallel to and spaced a distance from the conductor layer while in a relaxed state, the reflective layer configured to move relative to the conductor layer upon being switched to an actuated state, wherein the distance for some of the plurality of micromechanical devices is different from other of the plurality of micromechanical devices,

wherein at least the some of the plurality of micromechanical devices comprises a charged layer between the conductor layer and the reflective layer, the charged layer having an incorporated charged species; and

applying a voltage to the conductor layers and the reflective layers of the micromechanical devices to actuate the micromechanical devices.

2. The method of claim 1, wherein applying the voltage to the conductor layers and the reflective layers of the micromechanical devices to actuate the micromechanical devices comprises:

applying the voltage to the conductor layers and the reflective layers of the some of the micromechanical devices to actuate the some of the micromechanical devices; and

applying the same voltage to the conductor layers and the reflective layers of the other of the micromechanical devices to actuate the other of the micromechanical devices.

3. The method of claim 1, wherein the some of the plurality of micromechanical devices comprise the charged layer and the other of the plurality of micromechanical devices lack the charged layer.

4. The method of claim 1, wherein all of the plurality of micromechanical devices include the charged layer, wherein the charged layer of the some of the plurality of micromechanical devices comprise different charged species than the charged layer of the other of the plurality of micromechanical devices.

5. The method of claim 4, wherein the charged species in the charged layer of the some of the plurality of micromechanical devices have a different polarity than the charged species in the charged layer of the other of the plurality of micromechanical devices

6. The method of claim 1, wherein the some of the plurality of micromechanical devices further comprise an other charged layer spaced from the charged layer by the cavity, the other charged layer comprising additional incorporated charged species.

7. The method of claim 1, wherein the micromechanical devices form a display.

8. The method of claim 7, wherein the micromechanical devices are interferometric modulators, wherein applying the voltage alters an interference behavior of electromagnetic waves impinging on the conductor layers and the reflective layers.

9. The method of claim 8, wherein applying the voltage causes the micromechanical devices to display one or more of the colors red, green and blue.

10. The method of claim 1, wherein applying the voltage and applying the same voltage produces constructive interference centered at one or more desired light frequencies.

11. The method of claim 7, wherein the display is disposed in a portable electronic device.

12. The method of claim 11, wherein the electronic device is a phone.

13. The method of claim 1, wherein the incorporated charged species is a p-type ion.

14. The method of claim 13, wherein the p-type ion is chosen from the group consisting of potassium and phosphorous ions.

15. The method of claim 1, wherein the incorporated charged species is a n-type ion.

16. The method of claim 15, wherein the n-type ion is chosen from the group consisting of sodium ions and lithium ions.

17. The method of claim 1, wherein the conductor layer comprises a material chosen from the group consisting of chromium and indium-tin-oxide.

18. The method of claim 1, wherein the charged layer comprises an oxide.

19. The method of claim 18, wherein the oxide is chosen from the group consisting of aluminum oxide, silicon oxide, and tantalum oxide.

20. The method of claim 1, wherein the reflective layer comprises a metal.

21. The method of claim 20, wherein the metal is chosen from the group consisting of aluminum, nickel, and chromium.