MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

• US 20100081095A1
• Filed: 09/17/2009
• Published: 04/01/2010
• Est. Priority Date: 09/22/2008
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: SHIBAZAKI, Yuichi
• Granted Patent: US 8,508,735 B2
• Time in Patent Office: Days
• US Class Current: 430/325
• CPC Class Codes: G03F 7/30 Imagewise removal using liquid means
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/708 Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: Y10T 29/49009 Dynamoelectric machine

Abstract

A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body and measurement results of a second measurement system which measures a variance of the arm member using a laser interferometer. In this case, the drive system corrects measurement errors caused due to a variance of the arm member included in the measurement results of the first measurement system, using the measurement results of the second measurement system.

Claims

1. A movable body apparatus, comprising:

a movable body which is movable within a predetermined plane including a first axis and a second axis that are orthogonal to each other, with a measurement plane placed along a surface substantially parallel to the predetermined plane;

a first measurement system which has an arm member having at least one end section facing the measurement plane and whose longitudinal direction is in a direction parallel to the first axis, the first measurement system irradiating at least one first measurement beam on the measurement plane from the arm member, receiving light from the measurement plane of the first measurement beam, and measuring a position of the movable body at least within the predetermined plane; and

a second measurement system which measures a variance information of the arm member; and

a drive system which drives the movable body based on an output of the first measurement system and the second measurement system.

2. The movable body apparatus according to claim 1 wherein

the second measurement system measures the variance information of the arm member by an optical method.

3. The movable body apparatus according to claim 2 wherein

at least a part of the arm member consists of a solid section where light can pass through inside, and

the first measurement system has a light wave interference measurement system that irradiates at least one second measurement beam on a detection surface provided on a surface on the one end of the arm member from the other end of the arm member via the solid section and receives a reflected light of the second measurement beam from the detection surface, and measures the variance information of the arm member based on measurement results of the light wave interference measurement system.

4. The movable body apparatus according to claim 3 wherein

the detection surface is a reflection surface, and

the light wave interference measurement system irradiates a plurality of the second measurement beams which are parallel to the first axis on the detection surface, receives reflected lights from the detection surface and measures an optical path length of each of the plurality of second measurement beams.

5. The movable body apparatus according to claim 4 wherein

the arm member has a cross section orthogonal to the first axis which is a rectangular shape, and

the light wave interference measurement system makes each of the plurality of second measurement beams enter inside the solid section from positions corresponding to at least the four corner sections of the detection surface.

6. The movable body apparatus according to claim 4 wherein

the light wave interference measurement system measures the optical path length of the plurality of second measurement beams, using a common reference beam.

7. The movable body apparatus according to claim 3 wherein

a grating is provided on the detection surface, and

the light wave interference measurement system receives a diffraction light from the detection surface, and measures a displacement of the detection surface in a periodic direction of the grating.

8. The movable body apparatus according to claim 7 wherein

the detection surface includes two diffraction gratings whose periodic directions are two directions that are orthogonal to each other within the detection surface, and

the light wave interference measurement system irradiates two measurement beams corresponding to the two diffraction gratings as the second measurement beam, respectively, receives each of the diffraction lights from the detection surface of the two measurement beams, and measures a displacement in the two directions of the detection surface.

9. The movable body apparatus according to claim 3 wherein

the first measurement beam proceeds in a direction parallel to the first axis inside the arm member, and

the arm member has an optical system which directs the first measurement beam proceeding inside the arm member toward the measurement plane, in the vicinity of the one end.

10. The movable body apparatus according to claim 9 wherein

a grating is formed on the measurement plane, and

the first measurement system receives a diffraction light from the measurement plane of the first measurement beam.

11. The movable body apparatus according to claim 10 wherein

the optical system makes one of the diffraction light from the measurement plane and a synthesized light of a plurality of diffraction lights from the measurement plane proceed in a direction parallel to the first axis inside the arm member.

12. The movable body apparatus according to claim 10 wherein

the measurement plane includes a first and second diffraction grating whose periodic direction is in a direction parallel to the first axis and the second axis, respectively, whereby

the first measurement system irradiates a first axis direction measurement beam and a second axis direction measurement beam respectively corresponding to the first and second diffraction gratings from the arm member to the measurement plane, as the first measurement beam, and receives each of the diffraction lights from the measurement plane of the first axis direction measurement beam and the second axis direction measurement beam, and measures a position of the movable body in directions each parallel to the first axis and the second axis.

13. The movable body apparatus according to claim 12 wherein

the first measurement system irradiates at least two measurement beams whose irradiation point on the first diffraction grating is different to each other in a direction parallel to the second axis, on the first diffraction grating, as the first axis direction measurement beam.

14. The movable body apparatus according to claim 13 wherein

the at least two measurement beams and the second axis direction measurement beam are each irradiated on an irradiation point on a straight line parallel with the second axis on the measurement plane.

15. The movable body apparatus according to claim 1 wherein

an outgoing end section of the first measurement beam with respect to the measurement plane of the arm member faces the measurement plane in a movement range of the movable body.

16. The movable body apparatus according to claim 1, the apparatus further comprising:

a third measurement system which includes a light wave interference measurement instrument that irradiates a plurality of third measurement beams on the movable body and receives a reflected light to measure a tilt of the movable body with respect to the predetermined plane, whereby

the drive system drives the movable body based on an output of the first measurement system, the second measurement system, and the third measurement system.

17. An exposure apparatus that forms a pattern on an object by an irradiation of an energy beam, the apparatus comprising:

the movable body apparatus according to claim 1 in which the object is mounted on the movable body; and

a patterning device which irradiates the energy beam on the object mounted on the movable body.

18. The exposure apparatus according to claim 17 wherein

a measurement center of an irradiation point of the first measurement beam irradiated on the measurement plane from the first measurement system coincides with an exposure position which is a center of an irradiation area of the energy beam irradiated on the object.

19. The exposure apparatus according to claim 17 wherein

the movable body is made of a solid member whose inside the first measurement beam can proceed, and

of planes substantially parallel to the predetermined plane of the movable body, the measurement plane is formed on a first plane facing the object, and

the arm member faces a second plane opposite to the first plane.

20. A device manufacturing method, the method including:

exposing an object using the exposure apparatus according to claim 17; and

developing the object which has been exposed.

21. A movable body drive method in which a movable body is driven along a predetermined plane, the method comprising:

a first process in which at least one first measurement beam is irradiated to a measurement plane placed along a plane substantially parallel to the predetermined plane on the movable body, from an arm member having at least one end section facing the measurement plane and whose longitudinal direction is in a direction substantially parallel to the predetermined plane, light is received from the measurement plane of the first measurement beam, and a position of the movable body at least within the predetermined plane is measured;

a second process in which the movable body is driven, based on measurement results of the positional information and correction information of measurement errors caused by a variance of the arm member included in the measurement results.

22. The movable body drive method according to claim 21 wherein

in the second process, the movable body is driven, using correction information obtained in advance of measurement errors of a position of the movable body within the predetermined plane corresponding to a variance of the arm member.

23. The movable body drive method according to claim 22 wherein

the correction information is obtained by imitating and reproducing the variance state of the arm member by driving the movable body, and by measuring the measurement errors in the reproduced state.

24. The movable body drive method according to claim 22 wherein

the correction information is obtained by measuring the measurement errors in a state after the variance of the arm member.

25. The movable body drive method according to claim 21 wherein

in the second process, the movable body is driven by measuring a variance in the arm member, obtaining correction information of measurement errors due to the variance of the arm member based on the measurement results, and driving the movable body based on the correction information and measurement results of the positional information.

26. The movable body drive method according to claim 25 wherein

at least a part of the arm member consists of a solid section where light can pass through inside, and

the arm member Irradiates at least one second measurement beam on a detection surface provided on a surface on the one end of the arm member from the other end of the arm member via the solid section, receives a return light of the second measurement beam from the detection surface, and measures a variance of the arm member.

27. The movable body drive method according to claim 21 wherein

a grating is formed on the measurement plane, and

in the first process, a diffraction light from the grating of the first measurement beam is received.

28. An exposure method in which a pattern is formed on an object by an irradiation of an energy beam, the method comprising:

a drive process in which a movable body on which the object is mounted is driven using the movable body drive method according to claim 21 to perform pattern formation to the object.

29. A device manufacturing method, the method including:

exposing an object using the exposure method according to claim 28; and

developing the object which has been exposed.

30. An exposure method in which a pattern is formed on an object by an irradiation of an energy beam, the method comprising:

a first process in which the object is mounted on a second movable body, which is held relatively movable with respect to a first movable body at least within a plane parallel to a two-dimensional plane, by the first movable body movable at least along a two-dimensional plane including a first axis and a second axis that are orthogonal to each other, and has a measurement plane provided on a plane substantially parallel to the two-dimensional plane;

a second process in which at least one first measurement beam is irradiated from an arm member placed facing the measurement plane having at least one end section facing the measurement plane and whose longitudinal direction is in a direction parallel to the first axis, on the measurement plane, and light from the measurement plane of the first measurement beam is received, and a position of the second movable body at least within the predetermined plane is measured;

a third process in which a variance information of the arm member is measured; and

a fourth process in which the object is scanned with respect to the energy beam, by driving the second movable body in a scanning direction within the two-dimensional plane based on results of the second process and the third process.

31. The exposure method according to claim 30 wherein

the first movable body has a space inside, and

when a position of the second movable body is measured, the arm member is placed within the space of the first movable body facing the measurement plane.

32. The exposure method according to claim 30 wherein

at least a part of the arm member consists of a solid section where light can pass through inside, and

the arm member irradiates at least one second measurement beam on a detection surface provided on a surface on the one end of the arm member from the other end of the arm member via the solid section, receives a return light of the second measurement beam from the detection surface, and measures a variance information of the arm member.

33. A device manufacturing method, the method including:

exposing an object using the exposure method according to claim 30; and

developing the object which has been exposed.