SEMICONDUCTOR LIGHT EMITTING DEVICE HAVING TEXTURED STRUCTURE AND METHOD OF MANUFACTURING THE SAME
First Claim
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1. A method of manufacturing a semiconductor light emitting diode having a textured structure, the method comprising:
- forming a first semiconductor layer on a sapphire substrate;
exposing a portion of the sapphire substrate while forming the textured structure by etching the first semiconductor layer;
forming an intermediate layer on the exposed sapphire substrate between the textured structures of the first semiconductor layer; and
sequentially forming a second semiconductor layer, an active layer, and a third semiconductor layer on the first semiconductor layer and the intermediate layer.
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Abstract
A semiconductor light emitting diode having a textured structure and a method of manufacturing the same are provided. The semiconductor light emitting diode includes a first semiconductor layer formed into a textured structure, an intermediate layer formed between the textured structures of the patterned first semiconductor layer, and a second semiconductor layer, an active layer, and a third semiconductor layer sequentially formed on the first semiconductor layer and the intermediate layer.
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8 Claims
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1. A method of manufacturing a semiconductor light emitting diode having a textured structure, the method comprising:
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forming a first semiconductor layer on a sapphire substrate; exposing a portion of the sapphire substrate while forming the textured structure by etching the first semiconductor layer; forming an intermediate layer on the exposed sapphire substrate between the textured structures of the first semiconductor layer; and sequentially forming a second semiconductor layer, an active layer, and a third semiconductor layer on the first semiconductor layer and the intermediate layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification