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MICROFLUIDIC SYSTEMS AND METHODS FOR SCREENING PLATING AND ETCHING BATH COMPOSITIONS

  • US 20100084286A1
  • Filed: 06/04/2009
  • Published: 04/08/2010
  • Est. Priority Date: 12/06/2006
  • Status: Active Grant
First Claim
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1. A system for simultaneously screening impacts of a plurality of electrolyte bath compositions on a first electrode structure disposed on a substrate, the system comprising:

  • a device having multiple microfluidic channels, each microfluidic channel having an inlet port for receiving a fluid corresponding to one of the plurality of bath compositions,wherein in operation, the device is detachably disposed on the substrate so that different fluids corresponding to the plurality of bath compositions received in the multiple microfluidic channels act on different portions of the first electrode structure, thereby enabling simultaneous screening of the impacts of the plurality of bath compositions on the first electrode structure disposed on the substrate.

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