Micro-Electromechanical System Microstructure
First Claim
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1. A micro-electromechanical system microstructure comprising:
- a substrate adapted to support an electrode thereon;
a suspension mechanism supported on said substrate; and
a movable active part adapted to cooperate with the electrode to define a capacitor therebetween, and suspended on said substrate through said suspension mechanism so as to be movable to and fro relative to said substrate and the electrode;
wherein said suspension mechanism includes at least one supporting frame that protrudes from and that cooperates with an outer surface of said substrate to define a frame space therebetween, and at least one cantilever beam interconnecting said supporting frame and said active part.
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Abstract
A micro-electromechanical system microstructure includes: a substrate adapted to support an electrode thereon; a suspension mechanism supported on the substrate; and a movable active part adapted to cooperate with the electrode to define a capacitor therebetween, and suspended on the substrate through the suspension mechanism so as to be movable to and fro relative to the substrate and the electrode. The suspension mechanism includes at least one supporting frame that protrudes from and that cooperates with an outer surface of the substrate to define a frame space therebetween, and at least one cantilever beam interconnecting the supporting frame and the active part.
22 Citations
11 Claims
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1. A micro-electromechanical system microstructure comprising:
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a substrate adapted to support an electrode thereon; a suspension mechanism supported on said substrate; and a movable active part adapted to cooperate with the electrode to define a capacitor therebetween, and suspended on said substrate through said suspension mechanism so as to be movable to and fro relative to said substrate and the electrode; wherein said suspension mechanism includes at least one supporting frame that protrudes from and that cooperates with an outer surface of said substrate to define a frame space therebetween, and at least one cantilever beam interconnecting said supporting frame and said active part. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micro-electromechanical system device comprising:
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an electrode; and a MEMS microstructure including a substrate supporting said electrode thereon, a suspension mechanism supported on said substrate, and a movable active part cooperating with said electrode to define a capacitor therebetween, and suspended on said substrate through said suspension mechanism so as to be movable to and fro relative to said substrate and said electrode; wherein said suspension mechanism includes a plurality of supporting frames, each of which protrudes from and cooperates with an outer surface of said substrate to define a frame space therebetween, and a plurality of cantilever beams, each of which interconnects a respective one of said supporting frames and said active part. - View Dependent Claims (9, 10, 11)
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Specification