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Lithographic Apparatus and Device Manufacturing Method Utilizing a Substrate Handler

  • US 20100085553A1
  • Filed: 12/16/2009
  • Published: 04/08/2010
  • Est. Priority Date: 12/23/2004
  • Status: Active Grant
First Claim
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1. A substrate handler, comprising:

  • a support surface configured to carry a substrate; and

    a pre-conditioning unit configured to pre-condition the substrate;

    wherein the substrate handler is configured to move the substrate relative to a substrate table.

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