SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION CHAMBER

• US 20100089315A1
• Filed: 09/21/2009
• Published: 04/15/2010
• Est. Priority Date: 09/22/2008
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Schaller, Jason, Brown, Karl M.
• Application Number:
  US12/563,531
• Publication Number:
  US 20100089315A1
• Time in Patent Office: Days
• US Class Current: 118/504
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A shutter disk suitable for shield a substrate support in a physical vapor deposition chamber is provided. In one embodiment, the shutter disk includes a disk-shaped body having an outer diameter disposed between a top surface and a bottom surface. The disk-shape body includes a double step connecting the bottom surface to the outer diameter.

Claims

1. A shutter disk comprising:

a disk-shaped body, the body comprising;

a top surface;

a bottom surface;

an outer diameter disposed between the top surface and the bottom surface; and

a double step connecting the bottom surface to the outer diameter.

2. The shutter disk of claim 1, wherein the double step further comprises:

an outer step and an inner step, the outer step extending further into the body than the inner step.

3. The shutter disk of claim 2, wherein the body further comprises:

an outer wall connecting the outer step to the inner step, the outer wall substantially parallel to a centerline of the body.

4. The shutter disk of claim 3, wherein the inner step and the outer step are substantially perpendicular to the centerline of the body.

5. The shutter disk of claim 1, wherein the body further comprises:

an annular groove formed in the bottom surface disposed radially inward of the double step.

6. The shutter disk of claim 5, wherein the double step further comprises:

an outer step and an inner step, the outer step extending further into the body than the inner step but less than the annular groove.

7. The shutter disk of claim 1, wherein the body further comprises:

a blind hole formed in the bottom surface of the body, a centerline of the blind hole co-linear with a centerline of the body.

8. The shutter disk of claim 1, wherein the body is fabricated from at least one of aluminum, an aluminum alloy, an aluminum silicon alloy, a metal composite, and aluminum silicon (AlSi).

9. The shutter disk of claim 1, wherein the top surface of the body is coated with an aluminum coating.

10. The shutter disk of claim 1, wherein the top surface of the body is coated with a twin-arc-spray aluminum coating.

11. The shutter disk of claim 9, wherein the top surface is textured.

12. The shutter disk of claim 11, wherein the top surface has a roughness average of up to between about 600 to about 800 R_a.

13. The shutter disk of claim 1, wherein the body further comprises:

a sloped surface coupling the outer diameter to the top surface.

14. The shutter disk of claim 13, wherein the body further comprises:

a blind hole formed in the bottom surface of the body, a centerline of the blind hole co-linear with a centerline of the body.

15. The shutter disk of claim 13, wherein the double step further comprises:

an outer step and an inner step, the inner step extending further into the body than the outer step.

16. A shutter disk comprising:

a disk-shaped body, the body comprising;

a top surface;

a bottom surface;

an outer diameter disposed between the top surface and the bottom surface;

an outer step formed on the bottom surface;

an inner step formed on the bottom surface inward of the outer step, the outer step extending further into the body than the inner step;

an outer wall connecting the outer step to the inner step, the outer wall substantially parallel to a centerline of the body; and

an annular groove formed in the bottom surface disposed radially inward of the inner step.

17. The shutter disk of claim 16, wherein the inner step to the outer step are substantially perpendicular to the centerline of the body;

and the outer step extends further into the body than the inner step but less than the annular groove.

18. The shutter disk of claim 16, wherein the body further comprises:

a blind hole formed in the bottom surface of the body, a centerline of the blind hole co-linear with a centerline of the body.

19. The shutter disk of claim 16, wherein the body is fabricated from at least one of aluminum, an aluminum alloy, an aluminum silicon alloy, a metal composite, and aluminum silicon (AlSi).

20. The shutter disk of claim 19, wherein the top surface is has a roughness average of up to between about 600 to about 800 R_a and is coated with a twin-arc-spray aluminum coating.