PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME, AND DEPOSITING METHOD USING THE SAME
First Claim
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1. A deposition apparatus comprising:
- a plurality of reaction spaces;
a plurality of plasma electrodes respectively disposed in the reaction spaces;
a first plasma processor connected to at least two plasma electrodes; and
a first plasma power source connected to the first plasma processor.
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Abstract
A deposition apparatus according to an exemplary embodiment of the present invention includes a plurality of reaction spaces, a plurality of plasma electrodes respectively disposed in the reaction spaces, a first plasma processor connected to at least two plasma electrodes, and a first plasma power source connected to the first plasma processor. The first plasma processor may include a plasma distributor or a plasma splitter.
384 Citations
30 Claims
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1. A deposition apparatus comprising:
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a plurality of reaction spaces; a plurality of plasma electrodes respectively disposed in the reaction spaces; a first plasma processor connected to at least two plasma electrodes; and a first plasma power source connected to the first plasma processor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A plasma processor comprising:
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a plurality of plasma distributing circuits connected to a plasma power source; a plurality of plasma electrodes connected to output terminals of the plasma distributing circuits; and a driving circuit for controlling the plasma distributing circuits. - View Dependent Claims (27)
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28. A plasma processor comprising:
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an input terminal connected to a plasma power source; a switch connected to the input terminal for switching to connect input terminal to a plurality of output terminals; a plurality of plasma electrodes respectively connected to output terminals; and a driving circuit for controlling the operation of the switch.
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29. A plasma processor comprising:
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an input terminal connected to a plasma power source; a switch connected to the input terminal for switching to connect input terminal of the plasma distributing circuits to a plurality of output terminals; a plurality of plasma distributing circuits respectively connected to output terminals of the plasma distributing circuits; and a plurality of plasma electrodes respectively connected to the output terminals of the plasma distributing circuits. - View Dependent Claims (30)
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Specification