BIOSENSOR AND MANUFACTURING METHOD THEREOF
First Claim
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1. A biosensor, comprising:
- a first conductive semiconductor substrate;
a second conductive doping layer formed on the first conductive semiconductor substrate;
an electrode formed on top of both opposite ends of the doping layer; and
probe molecules immobilized on the doping layer.
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Abstract
Provided is a biosensor which can detect a specific biomaterial by an interaction between target molecules and probe molecules, and a manufacturing method thereof. The biosensor includes: a first conductive semiconductor substrate; a second conductive doping layer formed on the semiconductor substrate; an electrode formed on top of both opposite ends of the doping layer; and probe molecules immobilized on the doping layer.
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Citations
22 Claims
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1. A biosensor, comprising:
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a first conductive semiconductor substrate; a second conductive doping layer formed on the first conductive semiconductor substrate; an electrode formed on top of both opposite ends of the doping layer; and probe molecules immobilized on the doping layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing a biosensor, comprising the steps of:
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a) forming a second conductive doping layer on a first conductive semiconductor substrate; b) forming an electrode on top of both opposite ends of the doping layer; and c) immobilizing probe molecules on the doping layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification