APPARATUS FOR DEPTH-SELECTIVE RAMAN SPECTROSCOPY
First Claim
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1. A method of measuring sub-surface Raman scattering through a diffusely scattering sample, comprising:
- (a) supplying incident radiation at one or more entry regions on a surface of the sample;
(b) collecting light scattered within the sample, from a collection region on the surface, wherein one or more of the one or more entry regions are located around the collection region;
(c) detecting, in the collected light, one or more Raman features spectrally related to the incident radiation; and
(d) deriving, from the one or more Raman features, one or more characteristics of a sub-surface region of the sample.
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Abstract
Apparatus and methods for detecting Raman spectral features non destructively from sub-surface regions of a diffusely scattering sample are disclosed. Incident radiation is supplied at one or more sample surface entry regions, and light is collected from one or more collection regions spaced from the entry regions. Raman features are detected in the collected light, and depth information is derived according to the entry-collection spacings.
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Citations
59 Claims
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1. A method of measuring sub-surface Raman scattering through a diffusely scattering sample, comprising:
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(a) supplying incident radiation at one or more entry regions on a surface of the sample; (b) collecting light scattered within the sample, from a collection region on the surface, wherein one or more of the one or more entry regions are located around the collection region; (c) detecting, in the collected light, one or more Raman features spectrally related to the incident radiation; and (d) deriving, from the one or more Raman features, one or more characteristics of a sub-surface region of the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. Apparatus for measuring sub-surface Raman scattering through a diffusively scattering sample, comprising:
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a light source arranged to supply incident radiation at one or more entry regions on a surface of the sample; a collector arranged to collect light scattered within the sample, from a collection region on the surface, wherein one or more of the one or more entry regions are located around the collection region; a detector arranged to detect, in the collected light, one or more Raman features spectrally related to the incident radiation; and an analyzer configured to derive, from the one or more Raman features, one or more characteristics of a sub-surface region of the sample. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57)
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58. A method of detecting one or more sub-surface properties of a sample, comprising:
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directing probe light into said sample through one or more surface entry regions; collecting a portion of said probe light following scattering through said sample from said one or more entry regions to a surface collection region disposed within at least one of said one or more surface entry regions; detecting Raman spectral features in said collected probe light; and analyzing said Raman spectral features to derive said one or more sub-surface properties. - View Dependent Claims (59)
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Specification